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Axcelis NV-GSD-200E2 Medium Current Ion Implanter for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Axcelis NV-GSD-200E2 Medium Current Ion Implanter.
Please click on the "Send More Details" button at the end of the NV-GSD-200E2 description, if you'd like to get more details, photos and specifications of this Medium Current Ion Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Axcelis NV-GSD-200E2 Medium Current Ion Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Axcelis NV-GSD-200E2 Equipment Details

SDI ID: 99378
Manufacturer: Axcelis
Model: NV-GSD-200E2
Description: Medium Current Ion Implanter
Version: 150 mm
Vintage: 01.06.2000
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Energy Range

180KeV

Wafersize

150mm

Software Version

6.13.2

Workstation

Main only

Cell Controller

V6       MAC.       PartNr.:11053210

SECS/GEM

Sec Network Card

Mechanical Frame

Bolted

Filament P.S

EMS 10-60   Matusada (PartNr.: 120005656)

Cathoden P.S

Lumina Power Inc, (PartNr.: 120005295)

      Arc P.S

Matusada  120005657

Source Controller

PartNr.: 1184800       Vap. PS + Cable missing

 Dose DI

PartNr.: 11026560

SOURCE ASSY

Eterna ELS / Cust style ( 2  Cathode )

SOURCE BUSHING

Red old

 Extraction ELECTRODE

PartNr.: 1181634

Souce Injector Bleed

11020570

Extraction Suppression Supply

15KV 33mA PS/NV-15NN33 Glassman

Extraction Supply

Farnell

MER

 NO

EMER

1190500

Aperture / Flag Faraday

PartNr.: 11051050 PRP W/9mm aperture

Disk Faraday (fixed/TSDF)

PartNr.: 1199240

E-SHWR/SEF/PEF

PEF Xenon 11049260

Electron Flood Gas Panel

PartNr.: 11012580

Beamline Turbo (P8)

Leypold Turbovac 1000C    31001620466

Post Accel PS

Hi-Tek (Serial: 226945)

Post Accel Manipulator

PartNr.:  11028640

Source Isolation Trans

2400113555 (5kVA)

Terminal Isolation Transformer

11014430

Cooling

 Affinity (PartNr.. 11025010)

Wafer Transfer

PartNr.: 11026600

MACOBOT

PartNr.: 11026570

LOAD LOCK

PartNr.: 1176550

Gyro

PartNr.: 11023110

Rotary Drive Controller

Direct Drive  11026580

Y-Scan Controller

PartNr.: 11026590

Flowhood

missing

Disk Vac DI

Present (DISK VACCUM DI) 1195140

Light tower

Present (3COLOR)

Process Disk

150 mm ALU

CASSETTE TABLE

PartNr.: 11016690

Aligner

Standard  PartNr.: 1182020  11004390

Vac Cassette/Stand

PartNr.: 11027730 ( vcc :particle reduction )  Stand Cover missing

IN AIR ROBOT

PartNr.: 4693-0031-0001C (non metal pick)

WAFER HOLDER

PartNr.: 110142200

IN VAC ARM

PartNr.: 110141980

V3 Bellows

PartNr.: 19S0274

G/P Controller (E/S)

360 Stabil (IG3)   307 (IG1 & IG2)

E/S IG3 Stabil/Glas

Stabil (PartNr.: 360170)

Gas Box

PartNr.: 11030270

Mod Gas Modual

Modular (2 HP,2 SDS)

MFC Type As

Unit SDS 10sccm

MFC Type PH

Unit SDS   10sccm

MFC Type BF3

Tylan 2900 5sccm

 MFC Type Ar

Tylan 5sccm

P1

EDWARDS  STP A2203 P/N PT41SZ200XS

P1 Safety Ring (Seiko 2203) installed

yes

P8

yes

CRYO PUMP Comp
Local/Remote?

Remote

Freq. Converter

YES

Type Cryo Compressor

CTI Cryogenics Helix Technologies

Cryo Compressor P2/P3 9650

PartNr.:11026530

Cryo Interfacebox

PartNr.: 8112444G002

HYT

NO

Beamguide Gas

1187940

air interface box terminal

SMC 1913100

air interface box  in vac

PartNr.:1909770 (SMC 1909770)

air interface 2 (near InVac-Arm)

PartNr.:1909440  (SMC 1909440)

air interface1  (above IG2)

PartNr.:  1909430 (SMC 1909430)

LeadFloor

NO

Slot To Slot

NO

Bar Code Reader

NO

Burn Thru Sensor

NO

Smif

NO

UPS

NO

Remarks:

Flow Hood missing, no Roughpumps included (Edwards Setup)

-STILL INSTALLED IN THE CLEANROOM

-CAN BE INSPECTED BY APPOINTMENT

Categories:
Attachments: 44 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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