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PlasmaTherm SLR 740 Dual Chamber RIE / Plasma etch for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used PlasmaTherm SLR 740 Dual Chamber RIE / Plasma etch.
Please click on the "Send More Details" button at the end of the SLR 740 description, if you'd like to get more details, photos and specifications of this Dual Chamber RIE / Plasma etch, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This PlasmaTherm SLR 740 Dual Chamber RIE / Plasma etch is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


PlasmaTherm SLR 740 Equipment Details

SDI ID: 99403
Manufacturer: PlasmaTherm
Model: SLR 740
Description: Dual Chamber RIE / Plasma etch
Version: 200 mm
Vintage: 01.05.1999
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

The LH Chamber is Standard, the RH chamber is also RIE  , but with adjustable top electrode gap. (similar to old ECR config.)
Both chambers can work also as PE (Plasma Etch-Top power). RIE or PE is switched by software.
One Chamber has a Low pressure feature with TMP .the other one has no TMP,i.e just working med. Vacuum process using the rough pump (but has an option for adding TMP).
Each chamber has 8 Gas Channels (with 8 MFCs each).see attached XLS file.
  System is configured for European power rating, i.e 3 phase 400v.
 
   The system is currently  up and running  so is in fair condition. (see photos)
 
The equipment will include : 1 Chiller, 1 Process Rough Pump ,1 LoadLock pump (oil).

MFC CONFIGURATION:-

 

CHAMBER LEFT   GAS NAME MFC FULL SCALE UNITS MFC TYPE   CHAMBER RIGHT   GAS NAME MFC FULL SCALE UNITS MFC TYPE
    AR 100 SCCM MKS 1479A       CF-41 100 SCCM MKS 1479A
    CHF3 100 SCCM MKS 1479A       SF6 50 SCCM MKS 1479A
    C2F6 100 SCCM MKS 1479A       HE 100 SCCM MKS 1479A
    CF41 100 SCCM MKS 1479A       CHF3 100 SCCM MKS 1479A
    SF6 50 SCCM MKS 1479A       C2F6 100 SCCM MKS 1479A
    HE 100 SCCM MKS 1479A       O2 10 SCCM MKS 1479A
    O2 10 SCCM MKS 1479A       O2 100 SCCM MKS 1479A
    O2 100 SCCM MKS 1479A       AR 100 SCCM MKS 1479A

 

 

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