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| SDI ID | Manufacturer | Model | Description | Version | Vintage | Q. ty | Sales Conditions | Lead Time | |
|---|---|---|---|---|---|---|---|---|---|
| 116487 | Oxford | Plasmalab 80+ ICP65 | ICP INDUCTIVELY COUPLED PLASMA ETCH TOOL | up to 200 mm | 1 | as is where is | immediately | ||
| 116488 | Oxford | Plasmalab System 100 ICP 380 | ICP Reactive Ion Etcher | up to 200 mm | 1 | as is where is | immediately | ||
| 109595 | Oxford | NGP 1000 | PECVD | 150 mm | 01.06.2012 | 1 | inquire | ||
| 109097 | Oxford | Plasmalab System 100 | PECVD TEOS with Load Lock | 200 mm | 01.05.2001 | 1 | as is where is | immediately | |
| 116042 | Oxford | PlasmaPro 100 | Cluster tool with 3 x PlasmaPro 100 RIE Chambers and 1 x PlasmaPro Cobra 100 Chamber | 200 mm | 01.06.2017 | 1 | as is where is | immediately | |
| 91329 | OXFORD | 800+ | RIE (Reactive Ion Etcher) | 1 | as is where is | immediately | |||
| 111600 | Oxford | Plasmalab 100 | Laboratory PECVD and ICP/RIE tool with 2 chambers and a loadlock | 150 mm | 1 | as is where is | immediately | ||
| 116486 | Oxford Instruments | OpAL | Laboratory ALD tool used for Al2O3 deposition | up to 200 mm | 01.06.2016 | 1 | as is where is | immediately | |
| 110358 | Oxford Instruments | OPT AMU | Match | SPARES | 1 | inquire |