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Oxford Plasmalab 80+ ICP65 ICP INDUCTIVELY COUPLED PLASMA ETCH TOOL for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Oxford Plasmalab 80+ ICP65 ICP INDUCTIVELY COUPLED PLASMA ETCH TOOL.
Please click on the "Get Quote" button at the end of the Plasmalab 80+ ICP65 description, if you'd like to get a quotation, photos and specifications of this ICP INDUCTIVELY COUPLED PLASMA ETCH TOOL, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Oxford Plasmalab 80+ ICP65 ICP INDUCTIVELY COUPLED PLASMA ETCH TOOL is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Oxford Plasmalab 80+ ICP65 Equipment Details

SDI ID: 116487
Manufacturer: Oxford
Model: Plasmalab 80+ ICP65
Description: ICP INDUCTIVELY COUPLED PLASMA ETCH TOOL
Version: up to 200 mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Deinstalled and warehoused
-Can be inspected by appointment
-Electrical Requirements: 208VAC 3 phase 50/60 Hz 24 A
-Main breaker rating: 32A
-Largest Load: 16A
-Interrupt current: 4500 AIC
-With Comdel CX-600S Ultra Stable 13.56MHz RF Generator
-With Alcatel ACT 600T Turbo Pump Controller
-With MKS mass Flow Controllers
-With VAT gate valve
-Tubro pump type: Adixen ATP 400 HPC

-See attached photos for details of current condition


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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