Bruce BDF-41 4-Tube horizontal furnace for Sale

 -Still installed and shut down in the fab 
-Was Running wafers Up until May 2025
-Set up for Open 6 inch wafer cassette loading 
-Can be inspected by appointment 
-Configuration and photos are available on request

Convertible to 8 inch wafer size: No

Configuration: Tube 1: Anneal REFLOW - Tube 2: Oxide DOX Tube 3: LPCVD Poly Tube 4: LPCVD Poly

GENERIC BRUCE BDF-41 PERFORMANCE SPECIFICATION
Standard specification 
Number of Tubes:4 
Wafer Size:100-200mm 
Load Station Filtration:Class 10 Mirror-Finished Horizontal Laminar Flow (HLF)
Wafer Loading:SiC Cantilever Loading (Standard), Softlander & Autodoor (Optional)
Boatloader Mechanisms: Heavy Duty Boatloaders & Controllers
Scavenger System:Individual All-Welded, Electropolished Scavengers with Dedicated Photohelic Gauges (Atmospheric Systems)
Scavenger Liners:Standard for POCl3 Processes
Number of Heating Element Zones:5 (Standard), 3 (Optional)
Heating Element Flat Zone (Typical): Length = 1000mm; Temperature Range = 400 - 1370° C
Heating Element Types: LPCVD, Atmospheric, High Temperature, Fast Cool Core®
Temperature Controller:Intempos® Intelligent Temperature/Overtemperature Control Module
Furnace Exhaust:Low Profile Water-Cooled Heat Exchanger
Source Cabinet Gas Panel Layout:Vertically-Mounted with Point-of-Use Filtration
Atmospheric HCl Source: Schumacher Trans LC® Bubbler with KSEC Downstream and Bypass Valve Package 
Pyrogenic Oxidation Steam Generation: Series 5000 Torch and Controller
LPCVD Vacuum Components: 3" Diameter Valves and Plumbing Components
Tube Removal: From the Source Cabinet or Load Station
Furnace Controllers:Independent Tube Level 7355X DDC's with System UPS
Software System:APEX (Optional), SEC I, SECS II and GEM 
Safety Codes: Conforms to Applicable SEMI, NEC, ANSI, NFPA and OSHA Standards
Supported Processes: 
Anneal (N2, H2 Forming Gas), Dry Oxidation (with HCl, TCA or DCE), Pyrogenic Oxidation (with HCl, TCA or DCE), Liquid Deposition (POCl3, PBr3, BBr3), Polysilicon (Flat, Ramped, Doped), Amorphous Silicon, Silicon Nitride, TEOS, HTO, Cross Flow (LTO, PSG, BPSG)
  
All trade marks and names cited herein are property of Bruce Inc.
SDI is not an autorized reseller of Bruce products.