JPSA or IPG JPSA IX 6600 or IPGIX-255-LLO JPSA LASER LIFTOFF MACHINE MODEL 1X260-2 for Sale

-See attached recent photos of the tool, which is in excellent condition.

Specifications:-

Complete JPSA IX-260 System includes:
• Enclosed Class I Laser Micromachining System
• Integrated AC Disconnect Box
• All Granite System Includes:
• Beam Delivery and Motion stage 100% granite gantry structure
o Custom Weldment Frame, includes casters and machine feet
o External Laser mounting and integration
• High accuracy JPSA crossed-roller micrometer-adjust MicrotechTM camera stage alignment
assembly, optics vertical adjustment of ± 40mm (coarse) / 20mm (fine) range
• Variable attenuator, motorized, single plate type (1 wavelength, 248nm)
• 248nm optics kit
• Inspection system includes
o OXC “on-target” real-time corrected CCD viewing system, 0.7X to 5.5X zoom range
o Second high resolution inspection camera
o Video illumination: LED dimmer controlled light units
o Cross Hair Generator
• Camera display on PC monitor
JPSAControls32 System Control Software
Includes:
• Engineer level user interface that provides complete control of all system devices and software
components for system setup and programming
• System configuration editor, for convenient editing of system software settings
• Most system functions may be customized by the user through the use of ‘Macro’ scripts, see
below
JPSA SystemControls32 Module, provides:
• Advanced project management utilities that permit system software to ‘remember’ settings for an
unlimited number of different production tasks. This feature permits the system to be configured for
many different tasks. A project manager window allows the user quickly change the system from
job to another
JPSATools32 Module, provides:
• User access control for three levels: Operator, Maintenance, and Setup
• User list editor
• JPSA data entry controls used by all JPSA software, consistent user interface across all JPSA
software modules
JPSAMotionControls32 Module, provides:
• Setup and control of all motion stages including: linear stages, rotary stages, and laser fire axis
• Control of complex multi-axis vector motion, including X-Y stage motion with coordinated laser
firing
JPSALaserControls32 Module with JPSA Excimer Laser Driver, provides:
• Communication with and control of Excimer laser
• User interface window for accessing all operation and maintenance functions of the laser
JPSAMacroControls32 Module, provides:
• High level programming language that permits users to program complex automation sequences
that integrate motion control, digital I/O, and laser functions and then save them in files
• User friendly Macro Editor, features,
• Point and click programming – no need to memorize command codes
• Drag and drop editing within and between editor windows
• Macro Editor may be used to create scripts to customize nearly all JPSA system functions
Second Generation Six-Axis Motion Control System
Motion Control Electronics, includes:
• PC based motion control card, 6 axes of servo or step motor
• JPSA motion amplifier module, includes:
o Servo amplifiers
o Micro-stepping stepping amplifiers
X-Y Part Position Stage
Air Bearing High Accuracy System Features
• High precision JPSA design
• Linear scale encoders
• Brushless linear motor servo drive system
• X-Y Stage Specifications:
o Travel: 225x 200mm Travel, configured for up to 4” diameter wafers
o Resolution: 0.1μm
o Accuracy: +/- 3μm accuracy over 150mm of travel
o Repeatability: <1μm (bi-directional)
• Z -Theta Wafer Alignment Stage:
o Motorized Z-Theta system
• Z-Axis Specifications:
o Travel: 9.0 mm
o Resolution: 0.25μm
o Accuracy: 2.5 μm
o Repeatability: 4.0 μm (bi-directional)
• Theta Axis Specifications:
o Travel: +/- 175 Degrees
o Resolution: 0.001 Degrees
o Accuracy: 0.02 Degrees
o Repeatability: 0.002 Degrees
Wafer Chuck
• Elevated Vacuum Chuck for 2” or 4” wafers specified by customer at time of order.
• Alternate chuck designs available on request
• 3-point micro-adjustable leveling system with locking screws
Motorized Variable Attenuator Stage
• Step motor drive system
• Specifications:
o Travel: 90 degrees
o Resolution: 0.01 Degrees
Laser Fire Axis
• Generates TTL pulses to control laser firing while laser is in external trigger mode:
• Permits precise control of laser firing, including:
• Bursts of laser pulses with accuracy to a single pulse
• Laser firing coordinated with part motion with Fire on the Fly for LFOV Processing
Beam Delivery System
Includes:
• All Granite Beam Delivery Support Structure
• Vibration isolating mounting platform for wafer stages and beam delivery optics
• Stiffness and large thermal mass of granite structure prevent changes in beam delivery system
alignment over time.
Laser Beam Stop
• Computer Controlled Laser Beam Stop
JPSA Proprietary Optical System, includes:
• LFOV Optics Package 3mm x 3mm spot size (5mm Spot Size Optional)
• JPSA Precision Grade UV Optics and Optic Mounts for stability and ease of adjustment.
• Manual RVA Aperture Mask (Motorized RVA Optional)
• Fly-eye Homogenizer
Dual Beam Profilometer System
• CCD camera beam profilometer
• Video beam profile capture card and software
• Special on target profilometer crystal for process camera target profile viewing
• Mask Plane Viewing Profilometer with Pop in Beam Switcher
Coherent Lambda Physik LPXPro Excimer Laser
• Factory New Coherent LPXPro Excimer Laser
• 248nm Operation
• 200 Hz, Max Rep Rate
• 550mJ MAX Pulse Energy
• Compatible with both Standard LLO and Ostendo Low Stress LLO technology
• 2mm x 2mm FOV capability at 1J/cm2
JPSA Gas Handling System – Premix Configuration
• Ultra high purity semiconductor grade; JPSA excimer designed
• Single valve process F2 panel with Deep purge pig tail
• Premix Configuration