SDI fabsurplus.com is pleased to announce the availability of the following listed used TePla GigaBatch 380P incl waferhandler Resist Ashing System.
Please click on the "Get Quote" button at the end of the GigaBatch 380P incl waferhandler description, if you'd like to get a quotation, photos and specifications of this Resist Ashing System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TePla GigaBatch 380P incl waferhandler Resist Ashing System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 117059 |
|---|---|
| Manufacturer: | TePla |
| Model: | GigaBatch 380P incl waferhandler |
| Description: | Resist Ashing System |
| Version: | 150mm |
| Vintage: | Inquire |
| Quantity: | 1 |
| Sales Condition: | as is where is |
| Lead Time: | immediately |
| Sales Price: | Inquire |
| Comments: | De-installed, warehoused. Can be inspected by appointment.Technical Data Wafer Size Throughput Batch Size Wafer Loading 03/12 LIFE SCIENCE / INDUSTRIAL Plasma Chamber Model 360 P Model 380 P Model 360 P: up to 150 mm Model 380 P: 200 mm Up to 150 wafers/hour, depending on type of process Up to 75 wafers, depending on size Manual wafer loading outside of plasma chamber optional automatic loading with WTU Quartz, depth: 395 mm (15”) Diameter: 245 mm (9.6”), Volume: 18 l Diameter: 300 mm (12”), Volume: 28 l Performance Data Uptime MTBF MTTR Particle level Metal Contamination Standards>95% >500 h <2 h <0.1/cm2 @ 0.3μm Fe, Co, Ni <1010 Atoms/cm2 CE-certified, Semi S2/S8 compliant Supplies Electricity Process Gas, Vent Compressed Air230 V, 50/60 Hz, 15 A 1-2 bar (15–30 psi), 1/4” VCR female 6 mm Festo QS, 4-6 bar, (60-90 psi) Dimensions W/H/D Weight795 x 1540 x 710 mm (32” x 61” x 28”) 190 kg (420 lbs) |
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The data provided herein is not an offer capable of acceptance.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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