Muegge MX4000D1-110LL Control Rack 2.45GHZ Microwave Power Supply (4 KW) Control Rack for Sale

A Used Muegge Microwave Power Supply Rack, removed from a working Roth and Rau SiNA PECVD tool in 2012. In storage at our Avezzano 67051 Italy warehouse.

This Power Supply Rack comprises the following parts:-

7 X Muegge MX4000D1-110LL 2.45 GHz Power Supply Units.

1 x Fintec Industrial PC, x86 Family 6 Model 8 Stepping 6 AT with 130 KB Ram, Microsoft Windows NT 4.00.1381, Working to control the PSUs via CAN bus.

1 x VAT PM6 Variable Pressure Controller (Not shown in photos)

The Muegge microwave generator system comprises the following components:-
Microwave Power Supply: MX4000D1-110LL
Magnetron Head: MH2000S-215BB

Technical characteristics:
HF Frequency:2.450 GHz ± 10 Hz
CW HF Output Power: 2000 W max (0–100%)         
Pulse HF Output Power: 4000 W max (up to 500 Hz)   
Ripple: <30%                        
Waveguide Flange: UDR26

Magnetron Type: MB2565A-120BH with
Anode Voltage: -3500 V
Anode Current: 725 mA

Cooling:
Microwave Power Supply:
Air-cooled and Water-cooled: 3 l/min, 3 bar max
Magnetron Head:
Air-cooled and Water-cooled: 3 l/min, 3 bar max

Mains Power Supply: 3x 400 V / 50–60 Hz / 6 A on plug X1
Auxiliary Power Supply: 230 V / 50–60 Hz / 2 A on plug A1
Programming I/F : RS232 serial interface
Software System Type: CAN Bus Interface via CAN plug

Magnetron Power Supply Case Characteristics: 19" plug-in case, 460 mm depth

Magnetron Head Assembly Characteristics:
Case: Closed Box, Water Cooled.
Waveguide Flange: PDR26
Dimensions:LXWXH 230×125×300 mm

RACK WEIGHT AND DIMS: 

WEIGHT: 200 kg
HEIGHT: 230 cm
WIDTH: 62 cm
DEPTH: 86 cm