FEI Magellan 400L Extra-High Resolution Scanning Electron Microscope for Sale

- Still installed and operational
- Can be inspected by appointment
- An Extra-High Resolution Scanning Electron Microscope Magellan 400L (ThermoFisher, former FEI)

General Information:

XHR SEM Magellan offers accurate imaging with sub-nanometer resolution from 1 to 30 kV energy range. It provides the excellent contrast needed for precise measurements on materials in a variety of applications including novel materials, such as catalyst particles, nanotubes, porosities, interfaces, biological objects, and other nanoscale structures. High-resolution, high-contrast images are obtained without compromising the high throughput, analytical capabilities, sample flexibility, and ease of a traditional SEM. 

Key Features:

XHR SEM Magellan is equipped the monochromated Schottky-type FEG and a comprehensive set of electron detectors for scanning and scanning transmission electron microscopy. With a beam decelerator the landing energy of scanning electrons could be decreased down to 50 eV. A local elemental analysis and imaging is available with the EDS (energy dispersive X-Ray spectroscopy) via a large area Oxford XMAX Silicon drift detector working under INCA Energy 450 platform. The automated load lock allows to exchange the sample within 100 sec. The CryoCan and the in situ Plasma Cleaner provide contamination-free imaging at the lowest landing energies.This 400L model is specifically designed with high-resolution semiconducor imaging in mind.

-Since the stage is 100mm XY the largest wafer size that could be analyzed without cleaving is 4". 
-We sell Magellan with a holder for 3-4" wafers. 
-Larger wafers should be cleaved or analyzed only in the central 100mm2  size area.
-The tool is sold with a new FEG. The source was replaced during the last week of September 2026. This means that the gun IGP is also completely new.
-The mechanical parts of the automated LoadLock were replaced in July 2026.
-The microscope was under OEM service during all his usage starting from the warranty expiration date.
-The microscope is sold with an Oxford XMAX EDS system (20 sq mm detector + electronics + SW )

System Model:

FEI Magellan 400L

Electron source: Monochromated Schottky FEG (UC technology)

SEM/STEM Resolution:

1kV 3.2pA WD0.7 mm UC mode ON – 0.86 nm

15kV 6.3 pA WD4 mm ModeII UC mode OFF – 0.7 nm

STEM Resolution:

30kV 6.3pA WD4.3mm - 0.5 nm

Voltage: 50V – 30 kV (incl. beam deceleration)

Beam current: 1pA – 22 nA

Stage:

5 Axis stage: 5 axes high precision and stability piezoceramic stage:

XY: 100mm, Z: ≥20mm, T: -10 ° to +60°, R: 360° continuous

Loadlock: Automated

Chamber: Large analytical with 21 ports with in situ Plasma Cleaner

Detectors:

• Secondary electron detector (ETD),

• Through-lens SE and BSE detector (TLD),

• Retractable high contrast solid state detector (vCD),

• Retractable Annular BF/DF/HAADF STEM detector

• IR CCD camera,

• add. optical Nav-Cam+ camera for navigation

• retractable EDS (20 sq.mm SDD XMAX Oxford)

Vacuum system:

Scroll + TMP + 2 x IGPs

High vacuum: IGP2 – 4.04E-10 mBar, IGP1 – 3.51E-7 mBar

Chiller: Neslab Thermo Flex900

SW version: 5.5.0.3305 Build date 02-16-2014 Build number 3305 release

OS: WinXP Professional, 2002, service pack 3