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Unaxis/Balzers ZH620 Alumina Fill Fill Sputter Deposition System for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Unaxis/Balzers ZH620 Alumina Fill Fill Sputter Deposition System.
Please click on the "Send More Details" button at the end of the ZH620 Alumina Fill description, if you'd like to get more details, photos and specifications of this Fill Sputter Deposition System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Unaxis/Balzers ZH620 Alumina Fill Fill Sputter Deposition System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Unaxis/Balzers ZH620 Alumina Fill Equipment Details

SDI ID: 102642
Manufacturer: Unaxis/Balzers
Model: ZH620 Alumina Fill
Description: Fill Sputter Deposition System
Version: 125 mm
Vintage: 01.06.2000
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Sales Price: Inquire
Comments:

Main Features:

high rate cavity filling Al2O3 process, 2 targets, DC and RF, Onboard Cryogenic pump, backside cooling, 5“ wafer size.

Tool Status: installed and operational, immediately available.

Please check pictures below for more uinformation

Chuck XY Stage (Programmable)

Travel range 310 mm x 310 mm (12.2 x 12.2 in)

Resolution 0.5 µm

Accuracy ± 2.0 µm (0.08 mils)

Repeatability ± 1.0 µm

XY stage drive Closed-loop high precision stepper motors

Speed* Slowest: 10 μm / sec | Fastest: 50 mm / sec

 

Chuck Z Stage (Programmable)

Travel range 30 mm (1.18 in)

Resolution 0.2 µm

Accuracy ± 2.0 µm

Repeatability ± 1.0 µm

Z stage drive Closed-loop high precision stepper motor

Speed* Slowest: 10 μm / sec | Fastest: 50 mm / sec

Guider Precision ball bearings

 

Chuck Theta Stage (Programmable)

Travel range ± 5.0°

Resolution 0.0001° (0.24 μm @ 300mm edge)

Accuracy < 2.0 µm (measured at the edge of the 300 mm chuck)

Repeatabilty < 1.0 µm

Theta stage drive High resolution stepper motor with linear encoder feedback system

 

XYZ Stage (Programmable)

Travel range (X x Y x Z)* 50 mm x 50 mm x 140 mm

(2.0 in. x 2.0 in. x 5.5 in.)

Resolution, X-Y axis 1 µm (0.04 mils)

Repeatability, X-Y axis ≤ 2 µm (0.08mils)

Accuracy, X-Y axis ≤ 5 µm (0.2 mils)

Resolution, Z axis 0.05 µm (0.002 mils)

Repeatability, Z axis ≤ 2 µm (0.08mils)

Accuracy, Z axis ≤ 4 µm (0.016 mils)

 

PROBE PLATEN Specifications

Material Nickel plated steel

Chuck to platen height 50 ± 0.5 mm

Platen cooling Fully integrated CDA cooling, by using the chiller CDA

Configuration Probe card holder 4.5 x 7” and/or MicroPositioners

Max. No. of MicroPositioners 8x DC MicroPositioners or 4x DC + 4x RF MicroPositioner Setup

RF MicroPositioner mounting Magnetic with guided rail

DC MicroPositioner mounting Magnetic

 

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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