SDI fabsurplus.com is pleased to announce the availability of the following listed used LAM Research 2300 Exelan Flex EX+ - Chamber Only Dielectric Etch chambers qty 3.
Please click on the "Send More Details" button at the end of the 2300 Exelan Flex EX+ - Chamber Only description, if you'd like to get more details, photos and specifications of this Dielectric Etch chambers qty 3, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This LAM Research 2300 Exelan Flex EX+ - Chamber Only Dielectric Etch chambers qty 3 is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 102737 |
|---|---|
| Manufacturer: | LAM Research |
| Model: | 2300 Exelan Flex EX+ - Chamber Only |
| Description: | Dielectric Etch chambers qty 3 |
| Version: | 300 mm |
| Vintage: | Inquire |
| Quantity: | 3 |
| Sales Condition: | as is where is |
| Lead Time: | Inquire |
| Sales Price (each): | Inquire |
| Comments: | Used, In Warehouse - Not Crated Sale of package for Qty 3 pcs of 2300 Exelan Flex EX+ - Chambers OnlyOther Missing or damaged parts: none.[Process Module 1]Chamber type:Flex EX PlusGas config.(sccm)=MFC full scaleC4F8(50)/CF4(200)/O2(3000)/Ar(1000)/CO(500)/CH3F(100)/O2(30)/CHF3(100)/O2(300)/Xe(500)/C4F6(50)/CH2F2(100)/O2(10)Source 60MHz 2500W/27MHz 3000W/2MHz 8500WLid Temp Control ~140℃ESC Temp Control ~60℃[Process Module 1]Chamber type:Flex EX PlusGas config.(sccm)=MFC full scaleC4F8(50)/CF4(200)/O2(3000)/Ar(1000)/CO(500)/CH3F(100)/O2(30)/CHF3(100)/O2(300)/Xe(500)/C4F6(50)/CH2F2(100)/O2(10)Source 60MHz 2500W/27MHz 3000W/2MHz 8500WLid Temp Control ~140℃ESC Temp Control ~60℃[Process Module 1]Chamber type:Flex EX PlusGas config.(sccm)=MFC full scaleC4F8(50)/CF4(200)/O2(3000)/Ar(1000)/CO(500)/CH3F(100)/O2(30)/CHF3(100)/O2(300)/Xe(500)/C4F6(50)/CH2F2(100)/O2(10)Source 60MHz 2500W/27MHz 3000W/2MHz 8500WLid Temp Control ~140℃ESC Temp Control ~60℃ |
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