SDI fabsurplus.com is pleased to announce the availability of the following listed used LAM Research 2300 Exelan Flex EX+ - Chamber Only Dielectric Etch chamber qty 3.
Please click on the "Get Quote" button at the end of the 2300 Exelan Flex EX+ - Chamber Only description, if you'd like to get a quotation, photos and specifications of this Dielectric Etch chamber qty 3, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This LAM Research 2300 Exelan Flex EX+ - Chamber Only Dielectric Etch chamber qty 3 is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 102737 |
|---|---|
| Manufacturer: | LAM Research |
| Model: | 2300 Exelan Flex EX+ - Chamber Only |
| Description: | Dielectric Etch chamber qty 3 |
| Version: | 300 mm |
| Vintage: | Inquire |
| Quantity: | 1 |
| Sales Condition: | as is where is |
| Lead Time: | immediately |
| Sales Price: | Inquire |
| Comments: | CRATING FOR EXPORT IS INCLUDED IN THE PRICE. Used, In Warehouse - Not currently crated FOR SALE OF QTY 3 CHAMBERS: pcs of 2300 Exelan Flex EX+ - Chambers OnlyOther Missing or damaged parts: none.[Process Module 1]Chamber type:Flex EX PlusGas config.(sccm)=MFC full scaleC4F8(50)/CF4(200)/O2(3000)/Ar(1000)/CO(500)/CH3F(100)/O2(30)/CHF3(100)/O2(300)/Xe(500)/C4F6(50)/CH2F2(100)/O2(10)Source 60MHz 2500W/27MHz 3000W/2MHz 8500WLid Temp Control ~140℃ESC Temp Control ~60℃[Process Module 1]Chamber type:Flex EX PlusGas config.(sccm)=MFC full scaleC4F8(50)/CF4(200)/O2(3000)/Ar(1000)/CO(500)/CH3F(100)/O2(30)/CHF3(100)/O2(300)/Xe(500)/C4F6(50)/CH2F2(100)/O2(10)Source 60MHz 2500W/27MHz 3000W/2MHz 8500WLid Temp Control ~140℃ESC Temp Control ~60℃[Process Module 1]Chamber type:Flex EX PlusGas config.(sccm)=MFC full scaleC4F8(50)/CF4(200)/O2(3000)/Ar(1000)/CO(500)/CH3F(100)/O2(30)/CHF3(100)/O2(300)/Xe(500)/C4F6(50)/CH2F2(100)/O2(10)Source 60MHz 2500W/27MHz 3000W/2MHz 8500WLid Temp Control ~140℃ESC Temp Control ~60℃ |
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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