LAM RESEARCH Vector Express CVD for sale

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This LAM RESEARCH Vector Express CVD is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

LAM RESEARCH Vector Express Equipment Details

SDI ID:	108577
Manufacturer:	LAM RESEARCH
Model:	Vector Express
Description:	CVD
Version:	300 mm
Vintage:	01.06.2003
Quantity:	1
Sales Condition:	as is where is
Lead Time:	immediately
Sales Price:	Inquire
Comments:	De-installed and warehoused. Can be inspected by appointment.Please refer to the attached photos for details of the current condition. Basic System (CARBON) WTS(backbone) Facilities Connection Configuration: Bottom Facilities Installation Factory Automation Interface (Over Head Transport): 04-146654-00 KIT,E84 COMPATABILITY,VCTR 2 FOUP or 3 FOUP Front End Interface: 2 FOUP (Brooks Fixports) Fixload FOUP RF ID Reader: Omron V640 (2 FOUP) Fixload Firmware: Rev 2.8.2.9 IMM Ready (Integrated Metrology): IMM Ready Orientation Left, BUCVD00007A Left Mount Front End (backbone): ATM Robot & Controller ATM Robot Firmware (for friction end effector): WAVE2, 1.0T, Use with Friction end effector, 75-294243-00 ATM Robot End Effector (Friction Type): 75-378690-00 (v 1.49 for use with Friction End Effector) Loadlock Motion Controller/Firmware: CNTRLR,TWO-AXIS,TRUST,2.84S,C3VCTR AHM Loadlock Pump: 04-322836-00 KIT,SINGLE KASHIYAMA NV60 LL PUMP,C3VCTR AHM XT Loadlock to Atmosphere Valve (VAT L-Motion): 60-376512-00 VALVE,GATE,MONOVAT,50X336,LL,OUTER DR,WT VAT L-motion Oring Type: Viton (Bonded, replace entire door) Loadlock to Chamber Valve (SMC Valve): 63-335469-00 VALVE,GATE,300MM,PNEU,BONDED GT 639,SMC SMC Chamber Oring Type: 60-300514-00 GATE,BONDED,300MM,SMC L-MOTION, CHEMRAZ Cooling Pedestals in Loadlocks: 02-277727-01 Right 02-277727-02 Left Active Wafer Centering with IMM Mount: 02-269945-00 (LED type) EBR cool Ped: 02-376062-00 PED ASSY,COOL,EBR 1.5,C3VCTR AHM EBR IOC: 02-303084-00 ASSY,HDSIOC3,EBR,C3VCTR EBR Deflector: 15-322724-02 FORK,MTG,DEFLECTOR,EBR,SLOT EBR Deflector Quartz: 15-374248-00 COVER,DFLCTR,QUARTZ,NO HOLES,VCTR,EBR EBR Gen: 27-366349-00 GEN,GAS,8.0KW,AX7690X,EBR Required Software Revisions: Module Controller Type: 02-321865-00 MC3R System Controller Type: 02-321865-00 MC3R System Software (Proteus): Ver 2.625 B27 System Software (QNX): Ver_6.05_B29 SIOC #0: 02-321646-00 ASSY,HDSIOC0,VECTOR SIOC #0 Firmware: Version 5.0 SIOC #1: 02-321647-00 ASSY,HDSIOC1,VECTOR SIOC #1 Firmware: Version 5.0 SIOC #2: 02-321648-00 ASSY,HDSIOC2,VECTOR SIOC #2 Firmware: Version 5.0 Windows Version: Windows 2000 Hardware Configuration: Shower Head Assembly (13 inch): 16-366826-00 SHWRHD,300MM,15" DIA,TC,SNGL PC STM,AHM Pedestal Position #1: 02-317598-00 PED ASSY,ST1-4,HI TEMP,ALN CERAMIC,C3VCT Pedestal Position #2-4 (w/o lift pin holes): 02-375616-00 PED ASSY,CERAMIC,2 ZN,NO PINS,C3VCTR AHM Captured Lift-Pin Assembly: 15-324069-00 PLATE，LIFT PIN，CAPTURED，AHM Remote Plasma Clean Power Supply: 27-324553-00 GENERATOR,PLASMA SOURCE,400KHZ,HF-S,CDA IR Endpoint Controller: 27-356649-00 CNTRLR,RMU,IREPD,PROC SNS,VIRTWL RF HF Generator: 2 Kilowatt: 27-372675-00 13.5MHZ,AXR-2000III-B-NVLK RF LF Generator: 2.75 Kilowatt : 27-316462-00 LOW FREQUENCY,2750.0W,CLX2750, HF RF Match Network: 27-367855-00 MATCH,13.56MHZ,5KW,COMET,24V DC LF RF Match Network: 27-359860-00 MATCH,400 KHZ,FIXED, RESISTIVE+CAPACITIVE High Speed Spindle: 02-381489-00 SPINDLE ASSY,WATER+GAS COOL,C3VCTR AHM Leak Check Shutoff Valve for Process Module: 04-166504-00 KIT,LEAK CHECK PORT,VECTOR Transfer Plate: 15-287724-00 FORK,XFER PLATE,ALN PED Pendulum Valve Assembly (Pressure Control Valve): 04-146459-00 KIT，HEATED PENDULUM VALVE，VCTR Pendulum (Controller/Firmware): 65PM-3K.12 Pendulum Valve Oring Type: 04-274919-00 (Chemraz 8085 gate oring * 2; sealing Viton orings) Baratron: Loadlocks: 27-126062-00 MANO,10 TORR,DSUB,1/2 VCR Baratron 1: Process Module: 27-10343-00 MKS 627A11TBC (27-10343-00), 10T heated Baratron 2: Process Module: 27-126667-00 MKS 750B13TCE2GK, 1000T Pressure Digital Display: 02-261354-00 ASSY，HASTINGS GAUGE， DIGITAL METER Gas Panel: MFC 1: Aera TC-FCD980C SiH4 1.5 SLM MFC 2: Aera TC-FCD981SBC N2 10SLM MFC 3: Aera TC-FCD981SBC C2H2 5.5 SLM MFC 4: Aera TC-FCD981SBC H2 10 SLM MFC 5: Aera TC-FCD981SBC He 20 SLM MFC 7: Aera TC-FCD982C N2O 25 SLM MFC 8: Aera TC-FCD981SBC O2 25SLM MFC 9: Aera TC-FCD980C NF3 3 SLM MFC B: Aera TC-FCD981SBC N2 10 SLM MFC C: Aera TC-FCD982C Ar 35SLM MFC D: Aera TC-FCD980C Ar 5SLM Abatement System: Model: 4x-inlet Vendor: DAS Heat wrap: YES(100℃) Ozonator: Ozonator Model: N/A Ozonator Vendor: N/A Ozonator Controller: N/A Neslab Vendor: N/A Heat Exchanger: Model: N/A Vendor: N/A Process Chamber Pump: Model: iXH3030T Vendor: BOC Edwards Heater Jacket @foreline: YES Heater Jacket @ exhaust to scrubber: YES
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LAM RESEARCH Vector Express CVD for Sale

LAM RESEARCH Vector Express Equipment Details

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