VEECO E475 Turbodisc MOCVD System configured for AsP use for Sale

Configuration of the tool:-

MOCVD
E475 AsP MOCVD Reactor
Metal Organic Chem. Vapor Dep. Equipment

VEECO TURBODISC -ENTERPRISE E475 As/P PLATFORM

TurboDisc®E475 As/P Growth Chamber - 1085709-2009
    • E475 Stainless Steel High Efficiency Growth Chamber.
    • Water cooled E475 Flow Flange assembly with linear alkyl injection manifold and hydride distribution.
    • Three zone resistive heater assembly with heat shields, electrical connectors and insulators.
    • Veeco® Turbo disc® susceptor for wafer carriers with solid spindle.
    • Integrated magnetofluidic rotation mechanism,motor,and drive assembly.
    • Front view port and pass-through with pneumatic shutter.
    • Water cooled base plate assembly with electrical and thermocouple feedthroughs and temperature regulation.
    • Low differential pressure MFCs for alkyl and hydride distribution and standard MFC's for hydrogen shroud flow distribution.
    • Pushflow MFC for inner alkyl zone.
    • Needle valves for hydrogen purge of rectangular Flow Flange view ports, side view ports, and loadlock passthrough.

    • Mechanical Switch gauge for over pressure monitoring.
    • DCPower Supplies for heater power.
    • Dual differential pumped o-ring seals for reactor flanges with pump and pressure monitor.

Turbo Disc E450/E475 Growth Chamber Exhaust System - 1083701-1004
    • Ebara ESA70W-D process exhaust pump with water cooled motors, nitrogen purge system, microprocessor with alarm/control via digital interface.
    • 4"exhaustline.
    • Manual ISO-100 (4" ) ballvalve.
    • Dual disposable high temperature particle filter.
    • Pneumatic KF-40 ballvalve.
    • KF-40 leak detector port.
    • Electronic pressure transducer.
    • Throttling gate valve.
    • Overpressure protection via switch gauge.
Turbo DiscE475 As/P Load lock & Platter Transfer    1080622-1005
    • High vacuum stainless steel load lock chamber with viewports and two dwell-stations for high throughput capability.
    • Pneumatically controlled, interlocked gate valve for isolation between growth chamber and loadlock chamber.
    • Vacuum robot for wafer carrier transfer with stainless steel end effector.
    • Pressure measurement of load lock Chamber.
    • Toxic gas sampling port.
    • Mechanical switch gauge for over pressure monitoring.

Turbo Disc E450/E475 Loadlock Exhaust System - 1090205-1001
    • Turbomolecular pump for high vacuum.
    • Dry scroll pump.
    • Pneumatic isolation 3"gate-valve.
    • ISO-100 protective stainless steel screen.
    • High vacuum ion gauge.
    • High   vacuum convectron gauge.
    • Low   pressure  nitrogen regulator.
    • KF-25 leak checkport.
    • Alkyl evacuation line.

TurboDisc E450/E475 Glovebox - 1084018-1008
    • Integrated glovebox wafer loading chamber with turntable for easy wafer loading.
    • Regenerable Nitrogen purifier/recirculation system with automated control for dry loading environment.
· Interlocked, pneumatically controlled gate valve for isolation
between loadlock chamber and glovebox.
·Automated antechamber with dedicated pump for wafer transfer to and
from system.
·Moisture monitoring with alarm capability.
·Storage shelves for extra wafer carriers and substrates.
·Ergonomically designed platform to assist operator w ith platter load
and unload access.

Water Cooling Assembly - 1086550-1011
SS Manifold & SS Fittings
Facility Connection: Bottom Feed
Dual Phosphorous Trap Assembly
·Water cooled phosphorous trap.
·KF-40 1.5" fitting connections.
·Four (4) KF-40 manual ball valves.

System Electronics and Control Modules - 380V 1095284-1001
·Veeco standard control modules for Substrate Rotation, React or
Temperature Control, React or Pressure, System Logic Control, and Pump
Activation.
·Integrated pow er load center with Emergency Pow er Off sw itch.
·Microprocessor unit with analog and digital control boards, input boards,
and Ethernet port for communication.
DeviceNet Control System
·Digital devices connected into a digital network.
·Allen Bradley PLC.
·Compliant to ODVA standard.
Hydrogen Detector
·Dual solid state sensor transmitters located above reactor and gas
panel.
·Rack mounted readout with alarm output.

EpiView Control and Monitoring Program
·EpiView Control and Monitoring Software.
·Graphical display windows for all gas panel, growth chamber, and
exhaust components.
·User-configurable parameters for valve states, analog scales and set
points.
·Data logging and viewing with configurable data rate and signal
selection.
·Export of data files to Microsoft Excel for analysis and presentation,
with automatic data compression.
·Deviation alarms to identify non-appropriate activities.
·On-line help.
·Advanced troubleshooting and diagnostic tools, automated maintenance.
·Report generator for run analysis.
·Event recording of system status and alarms.
·Definable levels for system security.
Epiview Local Control Interface - 1092594-1001
·Dell PowerEdge 2950 Industrial Server
·3.0GHz/2MB Cache, Xeon
·800MHz Front Side Bus
·1GB DDR2 400MHz (2X512MB) Single Ranked DIMMs
.Dual Removable 73GB, SCSI, 10K Drives w ith RAID1
.1.44MB Floppy Drive
.24X IDE CD-RW/DVD ROM Drive
.Three Ethernet ports (one available for Customer interface)
.Microsoft Window s 2000 SP4
.Microsoft Office Basic (Word & Excel)
.High Resolution 17" LCD Monitor
In-Situ Monitoring System 1096010-1060
RealTemp 200 Monitoring System - Quantity = 3
·Combined pyrometer and reflectometer unit to enable Emissivity
Corrected temperature measurement and control.
·Accurate reflectance and temperature measurement of individual wafers.
·Advanced software package for data analysis.
·Dedicated computer and electronics.
IDRT/RT Local Control Assembly - 1097878-1001
·High Resolution 17" Monitor
.Swing Arm for Monitor
Consumables Package
·Consumable items to support initial basic maintenance activity. This
package may not be all-inclusive, depending on maintenance activity.
Step Up Platform
·Ergonomically designed platform assists operator w ith tool load and
unload access.

Liquid Refrigerator Bath - Quantity = 7
·Water cooled version.
·Operating temperature range: -30 degrees C to 200 degrees C.
·Adjustable over-temperature protection.
·Bath cavity dimensions: 8.5" x 8.5" x 9.8"
1/8" SS Bubbler Legs - Quantity = 9
sets
E450 / E475 As/P Standard Material Demo - Solar Cells
Veeco Specification #1092623
Custom Gas Panel for E475 LDM
Veeco P/N 1200182 and GSD3560
Bubbler #1: DETe
Dilution Network Source Manifold (Single Bubbler)
.Five Valve High-Purity Welded Manifold.
.Metal Sealed Mass Flow controller for source, carrier push and
dilution gas.
.Metal Sealed Integrated Pressure Controller.
.Integrated Spool piece for Binary Gas Monitor.
Bubbler #2: DMZn
Dilution Netw ork Source Manifold (Single Bubbler)
.Five Valve High-Purity Welded Manifold.
.Metal Sealed Mass Flow controller for source, carrier push and
dilution gas.
.Metal Sealed Integrated Pressure Controller.
.Integrated Spool piece for Binary Gas Monitor.
Bubbler #3: TMIn
Standard Source Manifold (Single Bubbler)
.Five Valve High-Purity Welded Manifold.
.Metal Sealed Mass Flow controller.
.Metal Sealed Integrated Pressure Controller.
.Integrated Spool piece for Binary Gas Monitor.
Bubbler #4: TMIn
Standard Source Manifold (Single Bubbler)
.Five Valve High-Purity Welded Manifold.
.Metal Sealed Mass Flow controller.
.Metal Sealed Integrated Pressure Controller.
.Integrated Spool piece for Binary Gas Monitor.

Bubbler #5: TMGa
Standard Source Manifold (Single Bubbler)
.Five Valve High-Purity Welded Manifold.
.Metal Sealed Mass Flow controller.
.Metal Sealed Integrated Pressure Controller.
.Integrated Spool piece for Binary Gas Monitor.
Bubbler #6: TMGa
Standard Source Manifold (Single Bubbler)
.Five Valve High-Purity Welded Manifold.
.Metal Sealed Mass Flow controller.
.Metal Sealed Integrated Pressure Controller.
.Integrated Spool piece for Binary Gas Monitor.
Bubbler #7: TMAl
Standard Source Manifold (Single Bubbler)
.Five Valve High-Purity Welded Manifold.
.Metal Sealed Mass Flow controller.
.Metal Sealed Integrated Pressure Controller.
.Integrated Spool piece for Binary Gas Monitor.
Bubbler #8: CBr4
Standard Source Manifold (Single Bubbler)
.Five Valve High-Purity Welded Manifold.
.Metal Sealed Mass Flow controller.
.Metal Sealed Integrated Pressure Controller.
.Integrated Spool piece for Binary Gas Monitor.
Bubbler #9: TBA
Standard Source Manifold (Single Bubbler)
.Five Valve High-Purity Welded Manifold.
.Metal Sealed Mass Flow controller.
.Metal Sealed Integrated Pressure Controller.
.Integrated Spool piece for Binary Gas Monitor.
Hydride Dopant #1: Disilane
Dual Input Hydride with One Standard and One Dilution Network
Manifold
.High purity welded manifold with interlocked source and purge
valves.
.Metal sealed source calibrated MFCs with carrier gas calibrated
dilution network on one line

Dopant #2: Customer Specified Dopant
Single Input Hydride
.High purity welded manifold with interlocked source and
valves.
.Metal sealed source calibrated MFC.
Unit
Price
purge
AsH3 Dual Input Hydride
.High purity welded manifold with interlocked source and purge
valves.
.Metal sealed source calibrated MFCs
PH3 Single Input Hydride
.High purity welded manifold with interlocked source and purge
valves.
.Metal sealed source calibrated MFC.
Phantom Line for Alkyl Injector Block
.Direct Input Metal Sealed MFC to injector block.
Phantom Line for Hydride Injector Block
.Direct Input Metal Sealed MFC to injector block.

1087990-1005
WAFER CARRIER 15X4, 75DEG, 0.028DP, E475
1087990-1004
WAFER CARRIER 15X4, 75DEG, 0.017DP, E475