Applied Materials Mirra 3400 Stand-Alone Oxide/STI CMP for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Mirra 3400 Stand-Alone Oxide/STI CMP.
Please click on the "Get Quote" button at the end of the Mirra 3400 Stand-Alone description, if you'd like to get a quotation, photos and specifications of this Oxide/STI CMP, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Mirra 3400 Stand-Alone Oxide/STI CMP is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Applied Materials Mirra 3400 Stand-Alone Equipment Details

SDI ID: 106203
Manufacturer: Applied Materials
Model: Mirra 3400 Stand-Alone
Description: Oxide/STI CMP
Version: 200 mm
Vintage: 01.06.1998
Quantity: 1
Sales Condition: inquire
Lead Time: Inquire
Sales Price: Inquire

Technology    Oxide/STI/WCMP/CUCMP
Platform Type    MIRRA 3400
Wafer Specification    Selected Option
Wafer Size    200mm
Wafer Shape    Notch Type
Mirra 3400 CMP System   
System Information    Selected Option
Application    Oxide/STI/WCMP/CUCMP
System    Wet-In-Wet-Out
Process Type    All Process
Cleaner Type    NIL
Wet Robot Type    Standard, Refurbished
Wet Queue Tank    Yes
System Skins    Clear Skins
Load Cup    Full Contact HCLU, Overhauled
Cassette Type    8 inch
Performance Enhancement Options    Selected Option
Daily PM Reduction Kit (Clean Kit)    Yes
Pad Conditioner Head 1~3    DDF3
Pad Conditioner Disk Holder    Universal
Pad Conditioner Sweep Hard Stop    Yes
Pad Conditioner Retrofit    Normal DDF3
Pad Conditioner Gear Assembly Overhaul    Yes
Factory Interface Options    Selected Option
Platen 1 ISRM    Legacy ISRM
Platen 2 ISRM    Legacy ISRM
Platen 3 ISRM    Legacy ISRM
In Line Metrology    Not Applicable
SECS GEM Interface    Yes
Installation Type    Wet in Wet Out
Integrated System Basic FABS    Not included
FABS Robot Blade    NA
Cassette Tank    Optional
Factory Automation    No
Polisher Options    Selected Option
Polishing Head (Head1~4)    TITAN 1 x 4ea
Upper Pneumatics Assembly (UPA)    TITAN1 UPA
UPA Location    External Relocated
Pad Wafer Loss Sensor    Dual Sensor
Platen Temperature Control    No
Platen Temp Control Cable    No
Upper Platen Coating    Teflon Coating
Platen Gear Assembly Overhaul    Yes, Greaseless type
Slurry Delivery Options    Selected Option
Slurry Delivery    3 Slurries
Slurry Flow Rate    Standard Flow
Slurry Flow Controller (CLC)    Tokyo Keiso CLC x 3ea
Slurry Pump Head    Yes (Not Applicable, if CLC model)
Slurry Containment Bulkhead    Double Containment
Slurry Facilities    None
Slurry Loop Line    No
Slurry Loop Line A    Slurry (PL1, PL2, PL3)
Slurry Loop Line B    Optional
Slurry Loop Line C    Optional
Slurry Dispense Arm    Standard Length, Platen1~3 High Pressure Rinse
Slurry Leak Detector    Yes
Cleaner Plumbing    Not Applicable
DI Water    Standard
Slurry Tube    Yes
Slurry Filter & Housing    Optional
Slip Out Sensor Slurry Cover Each Head    Yes
System Safety    Selected Option
EMO Guard Ring    Yes
EMO IO    No
System Labels    English
System User Labels    English
LOTO Box    No
Smoke Detector    Yes
Polisher Slurry Leak Sensor    Yes
Electrical Requirements    Selected Option
Line Frequency    50 HZ
Line Voltage    200/208 VAC
Uninterruptible Power Supply    None
Power Lamp    Green Lamp
Power Connected Lamp    No
Circuit Breaker    200A
Controller Top Panel    Holes punched out for AC Power Cables Entry
Configurable IO    No
GFI Type    Standard 30mA
Isolation Transformer    No
Umbilical's    Selected Option
CAT Track Style    Water Fall
Polisher to Controller Cable    Standard 30ft
Controller to Monitor Cable    Standard
Slurry System Interface Cable    None
Factory Hookup    Selected Option
Upper Exhaust    Standard
Upper Exhaust Material    Stainless Steel
Lower Exhaust    None
Process Exhaust Vent Interlock Sensor    Yes
Upper Exhaust Connection    No Flange
Drain Manifold    4 Lines to Facilities
Drain Adapter    NPT Fittings
Internal Vacuum Venturi    Yes
Operating Hardware & Software    Selected Option
Hard Disk    Dual Hard Disk
Memory    128M or above
CPU    PIII CPU or above
Fabs Software    Fabs Daemon 1.35
Operating System    Windows NT 4.00.1381 or above
Software Version    MB60a1 or above
Endpoint    IB11h8
Cleaner Software    2.3.8
User Interface    Selected Option
Monitor Selection    1 FPD
Monitor 1 Location    Front FPD On Cart
Mouse or Trackball    Mouse (include keyboard)
Start Stop Button    Controller
Light Towers Selection    Polisher and Controller
Polisher Light Tower    Selected Option
Polisher Tower Mounting Type    Pole Mounted
Polisher Tower No of Colors    3 Color
Polisher Tower Lamp Type    Incandescent
Polisher Tower Colors Sequence    RYG
Controller Light Tower    Selected Option
Controller Tower Mounting Type    Pole Mounted
Controller Tower No of Colors    3 Color
Controller Tower Lamp Type    Incandescent
Controller Colors Sequence    RYG

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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