Ulvac Ceraus ZX-1000 PVD Cluster tool for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Ulvac Ceraus ZX-1000 PVD Cluster tool.
Please click on the "Get Quote" button at the end of the Ceraus ZX-1000 description, if you'd like to get a quotation, photos and specifications of this PVD Cluster tool, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Ulvac Ceraus ZX-1000 PVD Cluster tool is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Ulvac Ceraus ZX-1000 Equipment Details

SDI ID: 108913
Manufacturer: Ulvac
Model: Ceraus ZX-1000
Description: PVD Cluster tool
Version: 200 MM
Vintage: 01.05.1996
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire

De-installed, warehoused. Can be inspected by appointment. Further details are available on request.

Basic Config:-Reflow x 1, Ti/TiN LTS x1, Degas x 1, Ti x 1, Al x 1 Cryo Pump: Cryo-T8PN w/ RS5Refrigerator x 4set Turbo Pump:TMP 202LM x1set

Detailed Configuration:-


Maker ULVAC S/N SE96-96XX-X Vintage  
Model Ceraus ZX-1000 Machine ID   wafer size 8"
Auto Loader One single arm robot Two Cassette stage with Mapping fuction.
Rorze RP700L  
Load lock Two Load/Unload chambers Turbo pump SHIMAZU TMP202
              Turbo pump SHIMAZU TMP202
Transfer Chamber Robot KEYTRAN-II Turbo pump SHIMAZU TMP202
Chamber Type M-2 REFLOW Process REFLOW
M-3 PVD Ti/TiN
M-4 Degas Degas
M-5 PVD Ti
M-6 PVD Al
Turbo Pump M-2 SHIMATZU TMP 1002 Refrigerator RS5
DC Power Supply M-3 Kyosan    
M-5 Kyosan    
M-6 Kyosan    
Chiller Neslab SYSTEM III He Compressor Ulvac C30ZR
Dry Pump type M-1 Missing
M-2 Missing
M-3 Missing
M-4 Missing
M-5 Missing
M-6 Missing
M-7 Missing



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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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