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TEL TOKYO ELECTRON Lithius Photoresist Coater and Developer Track for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL TOKYO ELECTRON Lithius Photoresist Coater and Developer Track.
Please click on the "Get Quote" button at the end of the Lithius description, if you'd like to get a quotation, photos and specifications of this Photoresist Coater and Developer Track, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL TOKYO ELECTRON Lithius Photoresist Coater and Developer Track is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


TEL TOKYO ELECTRON Lithius Equipment Details

SDI ID: 108936
Manufacturer: TEL TOKYO ELECTRON
Model: Lithius
Description: Photoresist Coater and Developer Track
Version: 300 mm
Vintage: 01.04.2004
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:

-Has CE mark
-Still installed and operational
-Can be demoed by appointment
-It is scheduled to be released for sale around June 2023.
-It can be booked for purchase now by paying a deposit.
-Price is open to your best offer.
-Right to left flow
-Fitted with 4 DEV , 1 TCT, 1 ICT, 1 BCT, 2 COT
-Please refer to the attached photos showing also block diagram.
Number of nozzles each unit:
3-2 COT Resist 6 nozzles
3-3 COT Resist 6 nozzles
3-4 BCT Resist 6 nozzles
3-5 ITC Resist  4 nozzles
4-1 TCT resist 1 en 2
4-2 t/m 4-5  DEV

Here follows a key explaining the abbreviation of the units:
Spin Tower(Common)
Coat Process Station(Common) : COT
Coat Process Station(Each module) : COT
Bottom Anti Reflection Coat Process Station(Common) : BCT
Bottom Anti Reflection Coat Process Station(Each module) : BCT
Top Anti Reflection Coat Process Station(Common) : TCT
Top Anti Reflection Coat Process Station(Each module) : TCT
Immersion Top Coat Process Station(Common) : ITC
Immersion Top Coat Process Station(Each module) : ITC
Immersion Top Remove Process Station(Common) : ITR
Immersion Top Remove Process Station(Each module) : ITR


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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