KARL SUSS MA45 Mask Aligner for Sale

1 pc. Mask Aligner Karl Suss MA45 – inclusive Service and Function tested.

A Video of the system in operation has been uploaded and is visible at the following link:-

https://youtube.com/shorts/0X2oKGzcruI?feature=share
Prepared for Hard- and Softcontact
Mask Aligner for manual Alignment
(Substrates up to max. 100 x 100 mm, 4” Wafer)
Manuel Loading of Masks und Substrates
Adjustment by Micrometerbolts
Adjustment by Splitfield Microscope
Light source for various Spectral Ranges UV 300-400
Diffraction Optics UV 400
 
Base machine specification:
Base Machine with mechanical, pneumatic and electric equipment
X,Y, Theta und Z Adjustment with WEC-Head
(WEC-Head and Micrometerbolts for Rough and Fine Adjustment)
Lamphouse LH 350W
 
Optics equipped with:
Ellipsoidal Reflector
Cold Light Mirror UV 400
Diffraction Optics UV400
Diversion Mirror 45° (LH 350)
Frontlens 100 mm x 100mm
Lamp HBO 350 W/S
Power Supply CIC500 incl. Ignition Box
                
Splitfield Microscope
1 Set Oculars, 1 Set Objectives (customer wish)
1 Set Fibre Optics for Microscope Illumination
1 x Exposure Chuck 100 x 100 mm (4”)
1 x Mask Holder M-5”, S-4”
Checked through specialist, full functional, no missing parts.