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Ulvac Entron-EX W300 PVD (Physical Vapor Deposition) cluster tool, 3 chamber for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Ulvac Entron-EX W300 PVD (Physical Vapor Deposition) cluster tool, 3 chamber.
Please click on the "Get Quote" button at the end of the Entron-EX W300 description, if you'd like to get a quotation, photos and specifications of this PVD (Physical Vapor Deposition) cluster tool, 3 chamber, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Ulvac Entron-EX W300 PVD (Physical Vapor Deposition) cluster tool, 3 chamber is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Ulvac Entron-EX W300 Equipment Details

SDI ID: 108947
Manufacturer: Ulvac
Model: Entron-EX W300
Description: PVD (Physical Vapor Deposition) cluster tool, 3 chamber
Version: 300 mm
Vintage: 01.06.2011
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-De-installed, warehoused, can be inspected by appointment
-Was in working condition prior to de-installation
-Parts included: EFEM, Main Body, 2x PVD Chamber, 1x PC, Parts and Racks
-See attached photos for details of the current condition.

-Pumps: Shimadzu MP403LM and MP1003LM (Chamber pumps)
-Load Ports: Rorze 31RS72131-104-201 qty 3
-Vacuum Robots: KRC-4000Z qty 2
-Cryo Compressor: C30PZ(8HEAD)
Process chambers:
F1 Degas
F3 Etch RFG Type: ENI
R1 DC, HPK 15ZI qty 2
R1 DC, HPK 15ZI qty 2

Missing/Broken parts: None recorded
System Power Rating: 3 Phase,AC200V, 142A, 49 KVA 50/60 Hz
Fab Interface Configuration: 3 Load Ports



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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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