SDI fabsurplus.com is pleased to announce the availability of the following listed used Tazmo/Semix TR 6133UD Photoresist Coater and Developer tRACK, SOG type.
Please click on the "Get Quote" button at the end of the TR 6133UD description, if you'd like to get a quotation, photos and specifications of this Photoresist Coater and Developer tRACK, SOG type, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Tazmo/Semix TR 6133UD Photoresist Coater and Developer tRACK, SOG type is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 109015 |
|---|---|
| Manufacturer: | Tazmo/Semix |
| Model: | TR 6133UD |
| Description: | Photoresist Coater and Developer tRACK, SOG type |
| Version: | 100 mm to 150 mm |
| Vintage: | Inquire |
| Quantity: | 2 |
| Sales Condition: | as is where is |
| Lead Time: | immediately |
| Sales Price (each): | Inquire |
| Comments: | for Wafer Size: 4"- 6" Coater systems, 4"-6" (3) Zone hotplate Single / double cassette Fluoroware type with pitch of 3/16" for (25) Wafers SOG Nozzles: 0.85mm, 1/16" tubing Nozzle capping mechanism Nozzle cleaning with solvent Splash back cup cleaning with solvent Adjustable suck back valve Polypropylene tank: 1 gallon PVC, 11" Teflon solvent tubing and suck back valve (3) Vacuum chuck hot plates Heater capacity: 3.8 Kw (total) at 250°C Baking time: 0-999.9 secs with increments of 0.1 sec Normal indicator setting: ±3°C SOG Filter: .22 μm Fluoropore fitter Chemical cabinet: 5 Gallon capacity (2) Nozzles back side rinses (edge bead removal) Solvent filter: MILLIPORE CWFG00403 Fluorex / WGFG04HP6 Wafergard Gas line filter: MILLIPORE GTL WGFG01D Wafergard 0.22 μm filter Wafer transport system: Indexing elevator Vacuum chuck Shuttle mechanism Walking beam Control unit: Microprocessor: INTEL 8065 (main and (2) sub CPUs) Speed: 100-9000 RPM (4") / 8000 RPM (6") ± .15% (50-1990 RPM) and ±.1% (2000-6000 RPM) Alarm for speed ±3% of RPM (speed higher than 300 RPM) Acceleration: Maximum rate 1 sec for 0 to 5000 RPM (programmable in increments of 1 sec) Process: 20-Steps, 8 / 16 recipes Temperature control: ±1°C Uniformity with alarm setting of ±3°C Spinning, dispensing time: 0-99 Sec programmable Baking time: 0-999 Sec programmable Process display: Back-lit LCD. 2 pcs in Store
|
Get Quote |
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
Established in 1998, SDI has now built up an international network of sales agents and offices.
SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.
Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.
Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America
SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe
to our monthly equipment news update.
Request monthly equipment news
We'd love to get your feedback about our website and our services!
Fill in the Feedback Form