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Applied Materials Mirra Mesa Oxide CMP system, with SMIF for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Mirra Mesa Oxide CMP system, with SMIF.
Please click on the "Get Quote" button at the end of the Mirra Mesa description, if you'd like to get a quotation, photos and specifications of this Oxide CMP system, with SMIF, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Mirra Mesa Oxide CMP system, with SMIF is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials Mirra Mesa Equipment Details

SDI ID: 109063
Manufacturer: Applied Materials
Model: Mirra Mesa
Description: Oxide CMP system, with SMIF
Version: 200 mm
Vintage: Inquire
Quantity: 1
Sales Condition: inquire
Lead Time: 1 month
Sales Price: Inquire
Comments:

-Completely refurbished to your specification.

-See attached photos for current condition.

-See the pdf attached for the configuration in detail, also shown below in html:-

 

Wafer Size 200 mm    
Purpose CMP Chemical Mechanical Polishing    
System Name Mirra Mesa with SMIF FAB    
Deatailed System requirement MIRRA MESA CMP SYSTEM FOR OXIDE POLISHING    
Basic Mirra System including:      
Process Oxide CMP    
Tool type Mirra Mesa with SMIF FAB    
HSMS/Serial   HSMS, SECS II - GEM interface
Hardisk (SCSI/SSD) RAID 2 Bay HDD (SSD)    


Software
System OS Window NT
  Polisher Software Ver NA
  Optical endpoint NA
  Cleaner Software Ver NA
  Main board Pentium III 400MHZ 128MB
Mirra Hardware configuration Pad Conditioner (X3) PC Base arm hub
    DDF3 Head
    Standard Universal Holder
    Clear Pad Conditioner arm Cover
     
  Platen Teflon coated platen with Platen shield
  HCLU (X1) Standard HCLU
  Robot (X1) Wet robot with long blade
  Cross Kollmorgen head rotation Motor (X4), NSK replacement
    Wafer Loss Sensor Assembly (X4)
  ISRM Legacy for Platen 1,2 3
 

UPA
Upper Pneumatic Assembly (Regulator) /
SMC Upper Pneumatic Assembly
   
Waterfall design Upper Polisher Electrical/Pneumatics
    3 Port Rotary Union include refurbishment
  Head Standard Titan I Head
 

Slurry Delivery
Slurry line setup [2 delivery lines],
Platen1 & 2 (line1), Platen3 (line2 )
    -Extended rinse slurry dispense arm (2 slurry lines)
    peristaltic pump
     
 

Controller
* Start/Stop Button on Controller
    * Smoke detector for Controller
    * 3 Poles breaker
    * 200 - 230 VAC PS
    * 100 VAC Convenience outlet
    Separate controller with 30 feets umbilicals
 



Miscellaneous
Transparent skins for full machine
    * 2 sets of keyboard and mouse (PS2 type) with KVM switch system
    Through the wall configuration
    * EMO button, Blank label, CE compliant
    * Guard rings on all EMO Buttons
    * English safety labels
    * Drain 4 line system
    * Drip Pan
    * 8” Upper Exhaust Flange
    * Lower Exhaust with main exit by the top
    * Single spray Gun. Clear window in System skin.
Mesa

Megasonic
Megasonic Generator
    Megasonic Transducer Plate (New)
    Megasonic tank includes gasket, rollers replacement
    Megasonic Orion Heater includes refurbishment
    Megasonic Pump includes refurbishment
    Chemical Vessel setup (x2)
 

Brush Unit 1 and 2
Chemical Vessel setup for both Brush 1 & 2
    Brush open/close assembly ( Zaytran - Fixed brush gap type)
     
     
     
  SRD SRD module with lamp
  Output Separate Output module and SRD module Exhaust
SMIF Fab
Hardware Configuration

SMIF
3 SMIF port stations
    SMIF Fab with Mini Environment
    Ceramic robot blade with filter
    Patlite 4 color Light tower with buzzer (Red, Green, White, Yellow)

 


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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