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KLA-Tencor ARCHER 5 Optical Overlay measurement system for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-Tencor ARCHER 5 Optical Overlay measurement system.
Please click on the "Get Quote" button at the end of the ARCHER 5 description, if you'd like to get a quotation, photos and specifications of this Optical Overlay measurement system, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KLA-Tencor ARCHER 5 Optical Overlay measurement system is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


KLA-Tencor ARCHER 5 Equipment Details

SDI ID: 110725
Manufacturer: KLA-Tencor
Model: ARCHER 5
Description: Optical Overlay measurement system
Version: 150-200 mm
Vintage: 01.06.2001
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

The equipment is still installed in the cleanroom and it is currently running in production on 6 and 8 inch wafers.  Upon purchase, buyer to pay removal from fab costs.

I have uploaded a video of this tool loading an 8 inch wafer to youtube, and you can see it here:-

KLA Archer 5 loading a wafer

An optical CD Overlay Measurement system
Designed for sub-0.13-micron device production, the Archer features coherence probe metrology (CPM), which takes 3-dimensional measurements of overlay targets, as compared to the 2-dimensional measurements taken by other overlay metrology systems. The Archer also incorporates Adaptive Noise Reduction Algorithm (ANRA) focus methods, which enable overlay measurements over low contrast targets. Along with improved optic lenses, these enhancements provide up to a 30 percent increase in precision to within 2 nm.
The Archer incorporates several significant performance improvements over previous generation tools, which make it currently one of the industry's most user-friendly and lowest cost-of-ownership overlay metrology solutions. Its industry-leading throughput of up to 150 x 200 mm wafers per hour represents a 30 percent increase over previous generation tools. In addition,the Archer includes automated recipe setup and an easy-to-use Windows NT ® platform, which can reduce the training time needed to operate the tool.

-Fitted with dual open wafer cassette loaders for 150 mm and 200 mm wafers
-PRI/Brooks robot with dual blades
-Windows Software
-Software version: Archer 5 V 3.10.06.P23 build 113005

Upon purchase, buyer to pay for de-installation and rig out of fab.


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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