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ASM Eagle XP5 Plasma-enhanced ALD system with 2 chambers for SiO and SIN for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ASM Eagle XP5 Plasma-enhanced ALD system with 2 chambers for SiO and SIN.
Please click on the "Get Quote" button at the end of the Eagle XP5 description, if you'd like to get a quotation, photos and specifications of this Plasma-enhanced ALD system with 2 chambers for SiO and SIN, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASM Eagle XP5 Plasma-enhanced ALD system with 2 chambers for SiO and SIN is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


ASM Eagle XP5 Equipment Details

SDI ID: 111352
Manufacturer: ASM
Model: Eagle XP5
Description: Plasma-enhanced ALD system with 2 chambers for SiO and SIN
Version: 300 mm
Vintage: 01.06.2010
Quantity: 1
Sales Condition:
Lead Time: immediately
Sales Price: Inquire
Comments:

Tool Status: Deinstalled and crated and in storage. (March 2023)
The Eagle XP5 is a single-wafer , plasma-enhanced ALD system.
This system is fitted with 2 chambers.
Once chamber was fitted for SiO HT and the other chamber was fitted for SiN HT.
The temperature of operation is up to 440 celcius.
The chambers are fitted with Adtec Matches, Adnaced Engery paramount RFgs, Adanced Energy PDX for SiN
The system also has an Astex Astron model AX765707 remote plasma cleaner.

Process PE-ALD System
Software Version Eagle I ASMJ software (Windows embedded XP / OS)
Full set of schematics available on request.
Process PE-ALD Oxide, HT-SiO/HT-SiN
Hardware Configuration (fab):
Main System ASM PE-ALD System Mainframe 1
Handler System FI: Kawasaki / Vac: JEL 1
Factory Interface FOUP 2
Options System
Others Process Chamber (RC3 / RC4) 2


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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