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LAM Research 2300 Exelan Flex 45 Dielectric Etch 3 Chamber for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used LAM Research 2300 Exelan Flex 45 Dielectric Etch 3 Chamber.
Please click on the "Send More Details" button at the end of the 2300 Exelan Flex 45 description, if you'd like to get more details, photos and specifications of this Dielectric Etch 3 Chamber, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This LAM Research 2300 Exelan Flex 45 Dielectric Etch 3 Chamber is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


LAM Research 2300 Exelan Flex 45 Equipment Details

SDI ID: 95825
Manufacturer: LAM Research
Model: 2300 Exelan Flex 45
Description: Dielectric Etch 3 Chamber
Version: 300 mm
Vintage: 01.06.2007
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 950,000 USD
Comments:

-deinstalled in july 2019

[Chamber A]
Chamber type:Flex 45
Gas config.(sccm)=MFC full scale
C4F8(50)/CF4(200)/O2(3000)/Ar(1000)/
CO(500)/CH3F(100)/O2(30)/CHF3(100)/
O2(300)/C4F6(50)/Xe(500)/CH2F2(100)/
N2(1000)
Source 60MHz 2000W/27MHz 3000W/2MHz 5000W
Lid Temp Control ~140℃
ESC Temp Control ~60℃

[Chamber B]
Chamber type:Flex 45
Gas config.(sccm)=MFC full scale
C4F8(50)/CF4(200)/O2(3000)/Ar(1000)/
CO(500)/CH3F(100)/O2(30)/CHF3(100)/
O2(300)/C4F6(50)/Xe(500)/CH2F2(100)/
N2(1000)
Source 60MHz 2000W/27MHz 3000W/2MHz 5000W
Lid Temp Control ~140℃
ESC Temp Control ~60℃

[Chamber C]
Chamber type:Flex 45
Gas config.(sccm)=MFC full scale
C4F8(50)/CF4(200)/O2(3000)/Ar(1000)/
CO(500)/CH3F(100)/O2(30)/CHF3(100)/
O2(300)/C4F6(50)/Xe(500)/CH2F2(100)/
N2(1000)
Source 60MHz 2000W/27MHz 3000W/2MHz 5000W
Lid Temp Control ~140℃
ESC Temp Control ~60℃

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Attachments: 6 Files
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