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SDI fabsurplus.com is pleased to announce the availability of the following listed used DNS SK 2000 BVPE Photoresist coater and developer - 2 ct - 2 bct - 4 dev FOR SPARES USE.
Please click on the "Get Quote" button at the end of the SK 2000 BVPE description, if you'd like to get a quotation, photos and specifications of this Photoresist coater and developer - 2 ct - 2 bct - 4 dev FOR SPARES USE, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This DNS SK 2000 BVPE Photoresist coater and developer - 2 ct - 2 bct - 4 dev FOR SPARES USE is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

DNS SK 2000 BVPE Equipment Details

SDI ID:

116489

Manufacturer:

DNS

Model:

SK 2000 BVPE

Description:

Photoresist coater and developer - 2 ct - 2 bct - 4 dev FOR SPARES USE

Version:

200 mm

Vintage:

01.03.2004

Quantity:

Sales Condition:

as is where is

Lead Time:

immediately

Sales Price:

Inquire

Comments:

-Many important spare parts have been removed from this equipment

-The spare parts which are separated from the machine are available as per the attached list:-

Part Description and Part Number	Qty Available
DNS MAIN CONTROLLER;UA014/546A	1
KAWASAKI DRAWER;30C05C-A004(BHU2/IFB2)	1
KAWASAKI DRAWER;30C05D-A001(MHU1/TR)	2
KAWASAKI DRAWER;30C05D-A002(IHU/ID)	1
KAWASAKI DRAWER;30C05D-A003(BHU1/IFB1)	1
HEATER CONTROLLER;HECV-001	1
HEATER CONTROLLER;HECU-0112	1
SLAVE CONTROLLER;UA201/105A	4
I/O BOARD;P/N:BP-0121B	2
SLAVE CONTROLLER;UA201/106A	2
JAE MONITOR;UT3-63AE/DSS3-A	1
SLAVE CONTROLLER(DEV);UA201/102A	4
DAIKIN AIR UNIT;PUCX500C-1(ACU BODY)	4
I/O BOARD;BP-0107A(2-VC-35426)	4
TIV FLOWMETER;PSP-1	25
ETU CONTROLLER;INR-244-436	3
SLAVE CONTROLLER(CHEMICAL);UA201/114A	1
TOKYO FLOWRATE METER;OAC-1	11
I/O BOARD;P/N:BP-0084A	2
CKD VALVE;AMG00-X6US-4	6
CKD VALVE;AMDZ1-X4US-2	8
CKD VALVE;AMG01-X6US-4	5
CKD VALVE;AMG11-X8US-6	10
CKD VALVE;AMD01-X6US-4	16
YAMATAKE SENSOR;HPQ-T1-001	32
NAGANO KL77 PRESSURE SENSOR	5
SMC AIR VALVE;VZA2220-M5-X2	3
SMC Pressure Valve NA-13-707	1
DEVELOPER CUP(SD-R)	4
SANYO 103-7501-80G1 MOTOR W/ G10-60A021 GEAR	4
SANYO MOTOR;103H5510-8040 (NOZZLE)	8
MPS SCREEN;D4M5-GHA-D4	3
CKD VALVE;AMD02-X6US-4-1	6
CKD VALVE;AMD11-X1205	10
TOKYO LEAK SENSOR;RS-1000C-NC	4
SMC CYLINDER;CQ2B32C-P5103-XC10	8
MOTOR DRIVER;CSD5807N-P	4
I/O BOARD;P/N:BP-0113A	1
I/O BOARD;P/N:BP-0110A	1
KOMATSU CONTROLLER;FRD-A200-UC	10
POWER SUPPLY;S82W-622	1
DAIKIN CONTROL UNIT;PUCX500C-2	4
KOMATSU AIR CONTROLLER;SPC-2312-UC-A	4
CKD VALVE;AMD01-X6US-4-2	15
CKD VALVE;AMD01-X6US-4-1	30
SMC SERIAL UNIT;EX140-SSD1-X16(SV-X15)	23
CKD NOZZLE ARM;EHS-2001-195NL-534540	16
CKD CYLINDER;XCA-00-20-195-75-FL251301	16
MPS SCREEN;E4M5-GHA-D7	2
MPS SCREEN;R3S5-GHA-D	4
MPS SCREEN;71E-G-D5	1
MPS SCREEN;71E-G-D6	4
JAE MONITOR;UT3-63AE/DSS7-A	4
REMOTE I/O PCB(ANTI-STATIC/YZ07Z)	28
REMOTE I/O PCB(ANTI-STATIC/YZ06Z)	2
SLAVE CONTROLLER(COATER);UA201/101A	4
I/O BOARD;P/N:BP-0106A	4
MISTUBISHI SPIN MOTOR;HA-FH55-UE-S1	8
KOMATSU AIR UNIT;SPA-2312-UC(ACU BODY)	4
SANYO PENTASYN;PMM-BD-5702-12	6
SANYO PENTASYN;PMM-BD-5702-15	4
Breakout Board;BP-0125B	2
SERVICE PANEL BOARD;HEZD-001	4
OMRON ENCODER;E6A2-CW3C	8
SANYO MOTOR;103H3505-7020	8
CKD CYLINDER;SSD-KL-12-80	4
CKD CYLINDER;STR2-B-20-70-FL249261	4
SMC pressure regulating valveAR2000-02	4
SMC pressure regulating valveAR2500-02	1
SMC pressure regulating valveAR2500-03	1
DRAWER BREAKER;40631-1001	1
SPINNER EXPOSURE BOX;HEII-001	1
I/O BOARD;BP-0112A	1
ETU CONTROLLER;INR-244-432	11
DNS CP UNIT(CENTER)	8
DNS AHL UNIT(HOT PLATE)	2
DNS RHP UNIT(HOT PLATE)	7
DNS HP UNIT(HOT PLATE)	3
VALCOM DIGITAL COLOR PANEL METER;C34GI-SR1-E	2
VALCOM PRESSURE SWITCH VALVE SET	1
SMC VALVE;SZ3260-5-M5-X15	18
SMC VALVE;SZ3A60-5-M5-X7	4
SMC SOLENOID VALVE;VXD2130	3
JAE MONITOR;UT3-DSS8-B	1
SMC REGULATOR;SRH3101-02-X236	1
SLAVE CONTROLLER;UA201/110A	1
DNS INVERTER;2VC40181	1
DNS MAIN CONTROLLER;UA015/545A	1
CKD VALVE;NAB1-8	2
CONTEC;SWITCH HUB;SH-8008(FIT)GY	4
CONTEC;POWER SUPPLY;POW-AD22GY	1
DNS;HEMH-001 POWER MODUEL	1
SMC VALVE;SZ3360-5-C4-X15	4
SANYO DRIVER;PMDPB1A3C21	8
CKD VALVE;TDV-X003	3
SMC VALVE;SYJ3230-5MOZ	4
CKD VALVE;AMDZ1-X0415	4
CKD VALVE;LYX-0810	4
CKD CYLINDER;GRC-590	4
KAWASAKI ROBOT;TS310-C001S(IFB)	1
KAWASAKI ROBOT;TS520-C003S(CHAMBER)	1
TAMAGAWA FA-CODER;TS5314N510-2500C/T	4
CKD CYLINDER;STLB16-150M1	1
SMC MTS25-P8072-150 CYLINDER W/ TABLE MSQB30R	3
SMC CYLINDER;SSD-B-25-40-110	3
KAWASAKI ROBOT;TS520-D001S	1
EEW I/O IFC BOARD HEUD-701;BP-1065A	1
EEW SLAVE CONTROLLER;UA205/011S-2305	1
HAMAMATSU UV-SPOT LIGHT SOURCE;L8269-11	2
STAGE;SK-2000 EFT	1
SANYO MOTOR;103H5510-7011	1
CKD VALVE;AMDZ1-X5UR-2	3
PRESSURE TRANSDUCER;PA-850-103G-NGF GAUGE	1
SLAVE CONTROLLER;UA201/116A	1
KAWASAKI ROBOT;TS311-C005S(BHU)	1
KAWASAKI ROBOT;TS312-C001S(BHU)	1
KAWASAKI HUC RELAY BOARD;1HL-31(1HL-11)	3
NAGANO ZT60 PRESSURE GAUGE W/ SENSOR ZT17	12
SMC SOLENOID VALVE;SYJ3240-5LOZ-M5	1
SK2000-BVPE,POWER BOX	1
DNS POWER SUPPLY;PS8102	1
DNS POWER SUPPLY;PS8098	1
JAE;UT3-63AE/DSS6-A	1
STEPPING MOTOR;SANYO;103H3505-70GD3/G10-304	4

-Regarding the overall condition of this equipment, it is de-installed and warehoused.
Inspection is available by appointment.
Config: 2 Coaters / 2 BARC / 4 Developers

Wafer flow direction: Right to Left (Track interface is on the left side)

1.GENERAL INFORMATION	Clean Track SK2000 2 Coater/2 BARC 4 Developer w/ Stepper IF


Vintage	2004
OEM	DNS - SOKUDO
Model	SOKUDO SK2000-BVPE
Process	COAT/DEVE
Software version	9.K.0.0
2.WAFER SPECIFICATION
Wafer Size	200MM
Wafer Shape	SNNF (Semi Notch No Flat)
Wafer Cassette	8” PP Miraial
SMIF Interface	NO
3. SYSTEM CONFIGURATION
Process Block#	2
Coater head#	2
Barc Coater head#	2
Develop head#	4
Adhesion Chamber#	2
Cooling Plate#	10
Rapid Hot Plate(RHP)#	8
Hot Plate(RHP)#	3
EEW#	1
EEFT#	1
IFB#	1
Sourcws Bottle Cabinet((RESIST)	1
Chemical Box (HMDS/Solvent/NMDW)	1
Controller Cabinet	1
Power BOX	1
Handling Unit Controller	1
3-1. Carrier Station
Stage	1×4 Side Loading (Sender /Receiver)
3-2. Coater
Nozzle#	#6
Resist temperature System	1 temp control for 3 line x 2
Coater Cup	PP+PP+PPS
Spin chuck	PEEK
Resist Pump	PDS-105C-KPM4-S01
Back rinse flow	flow meter with sensor
VPS Pluse Mist Nozzle flow	flow meter with sensor
Edge Cleaner	flow meter with sensor
Solvent solution supply	Central supply
Drain	Central
3-3. Barc
Nozzle#	#2
Resist temperature System	1 temp control for 1 line x 2
Coater Cup	PP+PP+PPS
Spin chuck	PEEK
Resist Pump	PDS-105C-KPM4-S01
Back rinse flow	flow meter with sensor
VPS Pluse Mist Nozzle flow	flow meter with sensor
Edge Cleaner	flow meter with sensor
Solvent solution supply	Central supply
Drain	Central
3-4. Developer
Nozzle	Slit Scan Nozzle
Develop solution supply	Central supply
Developer Cup	PVC
Spin chuck	PEEK
Develop Nozzle Flow	flow meter with sensor
Develop Nozzle Wash	flow meter with sensor
Rinse Nozzle Flow	flow meter with sensor
Back Rinse Flow	flow meter with sensor
Develop temperature System	1 temp control for 1 line x 2
Drain	Central
3-5. Adhesion
Method	Vapor prime by N2 Bubbling
Hot plate	60-150deg by 0.1deg pitch
HMDS solution supply	Central supply
3-6. Hot Plate
Method	Proximity bake with ceramic ball
Hot plate	50-180deg by 0.1deg pitch
3-7. Cooling Plate
Method	Proximity bake with ceramic ball
Cooling plate	20-25deg by 0.1deg pitch
3-8. Rapid Hot Plate(RHP)
Method	Proximity bake with ceramic ball
Hot plate	70-150deg by 0.1deg pitch
3-9. Hot Plate(HP)
Method	Proximity bake with ceramic ball
Hot plate	60-250deg by 0.1deg pitch
3-9. EEW
Lamp	Mercury xenon
Wave length	365nm
3-10. EEFT (EEW and Thickness)
Lamp	Mercury xenon
Wave length	365nm
Lamp for resist thickness	Halogen
Wave length	400nm-800nm with low cut filter 480nm
3-11. IFB
Robot（BHU1)	1
Robot（BHU2)	1
Buffer	2

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Attachments: 42 Files

Filename:
DNS-SK2000-Spare-parts-list.xlsx
Size: 8349 bytes
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DNS SK 2000 BVPE Photoresist coater and developer - 2 ct - 2 bct - 4 dev FOR SPARES USE for Sale

DNS SK 2000 BVPE Equipment Details

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