Axcelis NV-GSD-VHE Very High Energy Implanter for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Axcelis NV-GSD-VHE Very High Energy Implanter.
Please click on the "Get Quote" button at the end of the NV-GSD-VHE description, if you'd like to get a quotation, photos and specifications of this Very High Energy Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Axcelis NV-GSD-VHE Very High Energy Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Axcelis NV-GSD-VHE Equipment Details

SDI ID:	116525
Manufacturer:	Axcelis
Model:	NV-GSD-VHE
Description:	Very High Energy Implanter
Version:	150 mm
Vintage:	01.06.2001
Quantity:	1
Sales Condition:	as is where is
Lead Time:	immediately
Sales Price:	Inquire
Comments:	The equipment has been decommissioned and is currently stored in the cleanroom as shown in the attached photos. Inspection available by appointment. Audit Report: General conditions Cosmetically perfect. Visual inspection The external surface are clean as well as the inside visible parts which confirm tool has been properly stored. Vintage: originally delivered in 2001 has been under OEM service contract until 2024 The tool was internally cleaned and decontaminated before the shut down. Audit of the tool No major missing parts were discovered. The equipment's configuration files are present on the HD and are not corrupted (including the Linac dataset). The equipment has a CE Safety Mark. • Wafer size: 6 inch • Wheel type: Full disk 17 wafers • Wafer tilt: yes • Source : Bernas • Extraction system: Triple axes • Gases: Arsenic, Boron, Phosphine (SDS), all bottles removed. There is also present plumbing for one Xe bottle. • SDS Gas box: yes • Max implantation energy (in KeV): 4.2 MeV (14 resonator configuration). • Max Extraction voltage (in KeV): 90 • Heat Exchanger: yes • Orienter type: flat • Hydrogen implantation available: no • Load and unload locks: yes • Source extraction alignment jig yes • AMU: yes • Beamline column: yes • Mechanical clamp: yes • PFS: HD Chiller: Affinity Triple Chiller is included Packing list:- 1. Power distribution unit 2. Gas box terminal 3. Source and analyzer terminal 4. Linear module 5. Cell control 6. Final energy magnet 7. disk module 8. End-station module 9. Compressor and backing pumps 10. Misc. items 11. Manuals 12. Doors 13. Various items 14. Various items 15. Panels 16. Various 17. Panels and various items. Software version: 5.6, running on a Sun SparcStation5 with O/S V 3.8.3
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Axcelis NV-GSD-VHE Very High Energy Implanter for Sale

Axcelis NV-GSD-VHE Equipment Details

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