MKS Instruments Liquozon VariO3 Ozonated Water Supply Unit for Sale

For immediate sale by Fabsurplus.com on behalf of our client.

This unit was delivered new in November 2022, and has not been used.

For technical details regadring this product, please refer to the following web page:-

https://www.mks.com/f/liquozon-vario3-ozone-water-system

MKS' LIQUOZON® VariO3 is a dissolved ozone gas delivery system providing high purity ozone in ultrapure water for Semiconductor and Electronic Thin Film applications like contaminant removal and surface conditioning via wet clean or rinsing methods. The high redox potential of ozone causes rapid conversion back to oxygen making it an environmentally friendly alternative to other chemical processes.

The VariO3 system has user controllable and configurable dissolved ozone concentration and flow rates, meeting specific requirements for a wide range of applications. The modular and versatile mechanical system interface makes it easy to integrate and service in today's equipment facilities and meets the latest safety and monitoring requirements.

    Ensures high purity surfaces by removing organic, metallic and particle contamination
    High yield oxide growth created by superior concentration control
    Unit to unit control for repeatable process performance
    Cost effective water, power and chemical consumption management reduces operational spending
    Eliminates environmental waste impact with easy conversion back to oxygen

Leading Technology

    MKS proprietary contacting system allows >80% ozone mass transfer
    <5% concentration accuracy at constant flow rates typical
    Green idle modes reduce excess water usage

Process

    Wide operation window with tight process control
    Analog and digital bidirectional communication with remote control
    High purity ozone environment

Reliability & Maintenance

    High unit to unit reliability and repeatability
    Market proven components with long life-spans
    Easy installation and operation

The LIQUOZON VariO3 platform hosts a number of models inside the same cabinet, covering a wide range of performance. The low concentration VariO3 delivers up to 90 ppm DI-O3 at rates of 2 liters/min and up to 15 ppm DI-O3 and flow rates of up to 60 liters/min .

The standard version  delivers a maximum of 31 ppm DI-O3 at 60 liters/min while having a boosted mid-range performance. Both are ideally suited for single wafer cleans, oxide growth, and post CMP cleans as well as immersion applications.

Specified achievable dissolved ozone concentration in UPW for a system pressure of 2.5 barg, a cooling water temperature and UPW temperature of 20°C.

Water consumption is a serious concern for semiconductor fabs. Depending on the process step, ultra-pure water may be required to constantly stream resulting in significant waste of water. The LIQUOZON Ozonated Water Delivery System is equipped with multiple modes to improve water usage efficiency by lowering initial water consumption and reclaiming used process water. The LIQUOZON VariO3 supports Idle Modes 15, 155, and 159.
LIQUOZON-VariO3 - Specifications

Type: Ozone Water Delivery System
Ozone Concentration: 3-90 ppm
Flow Rate: 2-140 lpm
Operating Pressure
Adjustable 1.0 to 3.0 barg (dependent on UPW supply pressure) without DIO3 Outlet Pump, Adjustable 1.4 to 3.7 barg (dependent on UPW supply and system pressure) with DIO3 Outlet Pump
    
Wetted Surfaces
Liquid: PFA, PTFE, quartz glass
Gas: 316L stainless steel, PFA, PTFE
    
Control Interfaces
Binary in/out (dry contacts), RS232, RS485, analog 4 - 20 mA in/out, USB (RS232 Com Port emulation)

Dimensions
1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)

Weight
315-400 kg, depending on configuration

Compliance
CE, SEMI F47, SEMI S2