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APT 3245 Automated Wet Chemical Processing System for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used APT 3245 Automated Wet Chemical Processing System.
Please click on the "Get Quote" button at the end of the 3245 description, if you'd like to get a quotation, photos and specifications of this Automated Wet Chemical Processing System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This APT 3245 Automated Wet Chemical Processing System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


APT 3245 Equipment Details

SDI ID: 116547
Manufacturer: APT
Model: 3245
Description: Automated Wet Chemical Processing System
Version: 150 mm / 200 mm
Vintage: 01.06.2002
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Deinstalled and warehoused
-see attached photos for details

Electrical Requirements
Power: 3.6 KW
Voltage: 208 VAC, 3 phase, 60 Hz, 40 Amps
Other facilities
CDA 80 PSIG
N2 60 PSIG
DI Water 30 PSIG

Exhaust Requirements
MAIN TOOL 100 SCFM
Aux unit 20 SCFM
Vacuum 20 mmHg

System Functionalities Installed:
-Binary Nozzle Atomization
-Backside Rinse
-Brush Rinse
-Nozzle 1
-Nozzle 1 Rinse
-Nozzle 2
-Nozzle 2 Rinse
-Ammonia Backside

Generic Description
The APT 3245 can be used in the following process areas:
1.Spray Develop for Laser Exposed Positive Resist
2.Spray Etch of Chrome, or Aluminum, others
3.Resist Strip
The system has the following possible functionalities:
-Chemical Dispense Using Fan or Binary Nozzle(s), and/or puddle dispense
-DI H2O Rinse Using One or Two Fan Sprays
-Spin Dry
-Automatic Chamber Rinse before the next substrate is processed

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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