DNS SS-80EX Acquaspin Wafer cleaning system with Nanospray for Sale

Manufacturer: Tech In Tech Co. Ltd, Kyoto 612-8486 Japan
Model: SS-80EX
Date: May 2016

Electric Supply: 3 Phase , 200 VAC , Full load 10.8 kVA 31.2 A, 50/60 Hz
3 wires + GND/PE
SCCR 10 kA
Main Breaker 60A
Mass: 1660 KG

1. The equipment has CE safety marking certification.
2. The equipment is still installed in the cleanroom
3. The equipment is not currently operational. Please refer to the attached photos which show the equipmemnt's current condition.

Configuration:
Number of wafer loading ports: Qty 4
Wafer Loader type: 150 mm, open cassette
Number of process modules: Qty 4
The modules do not have FFUs on top of them.
3 of the Process Modules are equipped with a Jet Nozzle and DI water
1 of the process modules is equipped with one Jet and one Nanospray nozzle and DI Water
The modules do not have Brush arms
The Jet Nozzle has qty 4 high pressure pumps installed. The Nanospray pressure is regulated  by the house supply.

Facilities connections:

1. Air
2. vacuum
3. N2
4. CO2
5. DI water
6. Cooling Water
7. NH4OH (Not currently used)
8. H2O2 (Not currently used)
9. Exhaust
10. Drain
11. Power Supply