Leybold Bühler SyrusPro 700 LT "Lift-Off" High Vacuum Optical Coating System for Sale

Manufacturer is Bühler Alzenau GmbH
Business Area LEYBOLD OPTICS
Siemensstr. 88
D-63755 Alzenau, Germany
The system is still installed in the cleanroom, and can be inspected by appointment.
See attached photos for details of current conditions.

This tool is a high vacuum coating system for the manufacture of precision optics.
It will allow you to deposit optical thin film coatings on many substrates.
It has a modular design for hardware and software.
It can be used for creating multi-layer optical stacks.
Substances which can be evaporated in the machine include Al, Al2O3, Ag, Au, CeO2, Cr, Ge, HfO2, MgF2, MgO, Nb, Nb2O5, Si, SiO, SiO2, Sn, Ta2O5, TiO2, Ti2O3, Ti3O5, YbF2, ZnS, ZrO, ZrO2 and the topcoat material OR-110 (Optron Inc.),using additionally the gases Ar and O2.

Chamber Vacuum: <= 8x10E-7mbar
Leak rate:
The leak rate is determined by a pressure rise test over 30 min.
q <=8x10E-5 mbar l/s
Pump down time (to p= 8x10E-6mbar): t< 25 min

-The machine has an extended chamber height for "Lift-Off" process.
Chamber size adapted for Lift-off
Chamber inner dimensions: 700mm x 700mm
Chamber inner height: Approximately 1550 mm
Size of vacuum chamber +S1 incl. main electrical cabinet +K1 (diagram above)
(W x L x H) approx: 1.75m x 1.95m x 2.63m
Weight of vacuum chamber +S1 incl. main electrical Cabinet +K1 (without pump set)
approx.: approximately 2500 kg
Total required floor space including safety-area and angular freedom of all door’s
(W x L x H): approx.:
- 3.1m x 4.8m x 2.59m (with closed door; without disassembly of Q6 changer)
- 3.7m x 4.8m x 2.81m (with open door; with disassembly of Q6 changer)
 
Vacuum Pumping System
Includes Cryo Pump Unit Coolvac 5000 iSL; w/ gate valve
Includes Prevacuum Pump Unit EV-S50P (Oilfree)

Software System: OptiControl Software

Includes: Substrate Heating Unit (rearside)
Quantity: 2 pcs
Description:
Each heating segment includes 2 heating circuits with SCR- control for each heating circuit to adjust temperature uniformity
Closed loop temperature control by means of thermocouple sensor
With protection ring to cover heating rods
Substrate heating station is placed at the top of the chamber.

Includes: PIAD Plasma Ion Assisted Deposition Sources.
Includes: Mark II+ Ion- Source. The MARK II+ ion source is applied either for a pre-treatment of the substrate’s surface in order to improve adhesion capabilities prior to the coating process or for an ion assisted coating process.

PVD Sources
Electrical equipment for one electron beam evaporator (type HPE)
consisting of:
1. High voltage power supply:
Features: Pulse rated technology; Digital controlled; Extreme fast arc detection
2. Filament power supply
including cathode (filament) heating unit and emission controller
3. Beam deflection unit
Programmable electron beam spot oscillation (pattern) for uniform energy distribution across the coating material surface area.
Remote control (joystick) for online pattern manipulation.
Technical Data:
Adaptation for Lift-off: Source-to-Substrate Distance approx.1.1 m
High voltage power supply: 10 kW; output DC 10 kV (typical DC 8 kV); DC 0-1000mA
Filament power supply: AC 0- 6V; AC 0- 60A
-Crucible 6-Pocket con. for HPE 12/10 (directly cooled)
Quantity: 1 pcs
Description:
Directly cooled crucible (each pocket is surrounded by cooling water for max. cooling)
For the evaporation of metals
Suitable for the use with EB- evaporator type HPE 12/10
Crucible exchangeable!
Including crucible cover plate
Technical Data:
Material: Cu
Conical pockets d=38mm, depth: 15mm
Pocket volume approx.: 6 x 14 cm³
Requirement for Lift-off:
Active pocket aligned to the centre of the calotte!
With cover plate to provide good separation of the pocket materials to avoid cross- contamination of the evaporation materials!
-Electron Beam Evaporator HPE 12/10
Quantity: 1 pcs
Description:
Flange mounted electron beam evaporator including shutter
Designed for large crucibles sizes to evaporate high material volumes
Precise crucible positioning by digital encoder
Motor for crucible rotation located at atmosphere
Modular beam generator for easy filament replacement
Technical Data:
Max. Power: 6kW
Electromagnetic beam deflection: 270°
Crucible diameter of up to 176mm

Thermal Evaporation Unit
Includes: Thermal evaporation source for clamping of one thermal evaporator boat including el. equipment
2 Water cooled current feed-through
2 Electrodes with clamping for boats (not water-cooled!)
1 Evaporation shutter with electro-pneumatic actuation
1 Electrical transformer and SCR controller
1 Uniformity mask fixed above the evaporator

Quartz Crystal Measurement System for layer monitoring
For physical thickness measurement, rate measurement and rate control.
Fully integrated into automatic process control system. Operation via system monitor screen (parameter input, actual values output).
Features:
- Simultaneous measurement of up to 3 separate quartz crystal sensor heads
- Each measuring port can be equipped with single-, multiple- and combined sensor heads
Technical Data:
Number of measuring ports: up to 3
Measurement quartz crystal frequency: 4- 6 MHz

Sensor Head Six-fold Quartz Crystal
Quantity: 1 pcs
Description:
Sensor head with 6 quartz crystals for physical thickness measurement.
Note: Cable feedthrough modified according to customer request.
Technical Data:
Oscillation frequency: approx. 6 MHz

Spare Parts Kit: Included
Technical documentation: Included