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EVATEC / OERLIKON Clusterline 200 PVD Cluster tool, configured for SiO2 deposition with 5 process chambers for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used EVATEC / OERLIKON Clusterline 200 PVD Cluster tool, configured for SiO2 deposition with 5 process chambers.
Please click on the "Get Quote" button at the end of the Clusterline 200 description, if you'd like to get a quotation, photos and specifications of this PVD Cluster tool, configured for SiO2 deposition with 5 process chambers, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This EVATEC / OERLIKON Clusterline 200 PVD Cluster tool, configured for SiO2 deposition with 5 process chambers is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


EVATEC / OERLIKON Clusterline 200 Equipment Details

SDI ID: 116775
Manufacturer: EVATEC / OERLIKON
Model: Clusterline 200
Description: PVD Cluster tool, configured for SiO2 deposition with 5 process chambers
Version: 150-200 mm
Vintage: 01.06.2000
Quantity: 2
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): Inquire
Comments:

-PVD Cluster tool
-Currently running in production, and configured for loading 150 mm wafers via open cassettes
-The tool can be used to load up to 200 mm wafers
-With qty 5 process chambers
-All qty 5 process chambers are configured for reactive SiO2 (Silicon Dioxide) Sputtering
-Qty 2 loadports
-Buffer stations for up to 5 wafers
-Wafer aligners
-OCR back side wafer readers
-Robot type: MX800
-Software version: 4.11.1.010 dated 8/13/2021
-Vintage: Jun  2000
-Supply Voltage: 400V 3L + N + PE, 50/60 Hz
I: 250A
P: 119 KVA
-CE marked
-Please refer to the attached photos showing the tool currently running in the cleanroom.
-Inspection is welcomed by appointment


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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