Ulvac SIV 500 PVD Deposition system for Sale

This ULVAC SIV-500 is a sputtering system used for depositing thin films, including Indium Tin Oxide (ITO), onto various substrates like wafers, glass, and other materials. It has an in-line vertical deposition design for low particle generation and can handle substrates up to 1000mm x 1000mm. This machine has been set up for 500mm x 500mm pallets (Supports several smaller wafers such as 100mm, 150mm, 200mm, & all the way up to 300mm). The system is suitable for applications such as displays and touch panels. 
Recently removed from a cleanroom in the USA, the system is in excellent condition and comes with target backing plates, helium cryo compressors (x2), Edwards dry pumps (x2), Shielding, and umbilicals. 
• 3-station process module (P1, P2, P3)  
• 5 kW pulsed DC power supply  
• P3 dedicated to ITO or other TCF  
• P3 has O₂ MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry  
• L/L has roughing pump and water pump  
• Process chamber has roughing pump, T-ed to turbo/water pump & cryo pump
manual load, (1) 500 × 500 mm carrier; uses Ulvac 12" cryo & 12" water pump/turbo
Voltage: 208 VAC +/- 5%, 3 phase, 60 Hz 3 wire plus ground, 145.5 A