Applied Materials Centura DPS+ POLY Dry Etcher with 2 chambers for Sale

Deinstalled, warehoused, can be inspected by appointment. See attached photos of the tool, prior to removal.

Section A : General Information
*******************************
Manufacturer    Applied Material inc.
Model    DPS PLUS POLY
Technology    Poly Etch
Platform Type    ETCH CENTURA II
Application    Poly Etch
Software    Unknown? E4.9_15?
Wafer Size    150mm(JMF)
Vintage: 2006

Section B: Mainframe Configuration
**********************************
Position A    DPS PLUS POLY
Position B    DPS PLUS POLY
Position C    -
Position D    -
Position E    -
Position F    Orienter
Front Panel    Anti-Static Painted
Signal Light Tower    3 Color(R,A,G)

Section C: Electrical Setup
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Line Voltage    200/208 VAC
Line Frequency    60 Hz
GFI    100mA
AC Rack Type    Centura II 66inch Common

Section D: Safety Equipment
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EMO Switch Type:    Press To Activate, Turn To Release EMO
EMO Guard Ring:     Included

Section E: Mainframe Options
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Chamber Wall Flow Sensor    Yes
Chamber Cathode Flow Sensor    Yes
Chamber Turbo Pump Flow Sensor    Yes
DPS Ch Dome Flow Sensor    Yes
Loadlock Type    Wide Body
Cassette Type Supported    Unknown
Loadlock Slit Valve    O-ring type(Viton)
Wafer Mapping    Enhanced(fast)
Robot Type    HP+
Robot Blade Option    Aluminium
Wafer On Blade Detector    Basic
Loadlock Vent Filter    Ceramic
Loadlock Heater    Install
Loadlock Vent    Top Vent

Section F: Orienter Chamber
***************************
Hoop Type    STD

Section G: Etch Chamber (DPS-R1)
********************************
DTCU    ES DTCU
Voltage Distributor Electrode    YES
Mount Ring    unknown
Lower chamber cover    STD
Lifter pin ass'y    Lip seal type(0010-39650)
TMP    EDWARDS
Pressure Gauge    CM100mt(MKS)
Pressure Gauge    CM10torr(MKS)
ESC HV MODULE    0010-30139
BIAS RF Matcher    0010-00854
Source RF Matcher    Install
HE Pressure Controller    MKS649A Type(50sccm)
Source RF Generator    Atlas2012
BIAS RF Generator    ACG-6B
Throttle Valve    Throttling Gate Valve(TGV)
Electrostatic chuck type    unknown
ETCH Pump Pipe Line(With heater)    for Edwards TMP
Cathode Ass'y    Single HE supply type
Upper Chamber    Full A-Coat
Ceramic dome    0200-39137
Single Ring    

Section H: Gas Panel Configuration
**********************************
MFC Type    AERA FC-D980C
ETCH_GAS1,11    CL2_200sccm
ETCH_GAS2,12    HBR_200sccm
ETCH_GAS3,13    -
ETCH_GAS5,15    -
ETCH_GAS6,16    CF4_200sccm
ETCH_GAS7,17    CHF3_100sccm
ETCH_GAS8,18    O2_100sccm
ETCH_GAS9,19    SF6_100sccm
ETCH_GAS10,20    AR_200sccm
Gas panel facilities hook up    BD Side SLD Box Bottom Feed
Gas panel exhaust    AC chamber  TOP Side
Gas panel controller    VME II
Valve    Veriflo
Transducer    MKS 872
Regulator    same
Filter    Milipore
Transducer Displays    same

Section I: System Configuration
*******************************
Endpoint Monitor    CRT
Endpoint Position    Rack Mount
Endpoint Type    same
Controller Type    same
Umbilicles    40 Feet Base
Controller to Mainframe Umbilical    40ft
AC To Mainframe Umbilical    40ft
Chiller Control Cable Length    40ft
Chiller Hose Length    50ft
Pump Signal Cable Length    50ft
RF RACK to MF Cable Length    75ft
Chiller type    SMC H2000
CATHODE(CH-A & B)    H2000(SMC)
WALL(CH-A & B)    H2000(SMC)
DOME(CH-A & B)    Facility Cooling Water
    
Coolant Type    DI+EG
Chiller power line    2ea(Tool C/B <--> Chiller)
chiller hose    Hose type_4ea(50Ft)
chiller signal line    Signal I/O
Pump Configurations    EBARA AA40W/AA10
Pump Interface Qty    4ea
Pump power line    4ea(Tool C/B <--> Pump)

Section J: Miscellaneous
************************
M/F Utility connection    Rear side
UPS    NONE
LAMP CB    20A
RF GENERATOR CB    (B)15A/(S)30A
PUMP CB    30A
System Monitor    1ea CRT(Stand Alone)
DTCU Hoist    single type