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NOVELLUS CONCEPT 3 INOVA NExT PVD Cluster Tool for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used NOVELLUS CONCEPT 3 INOVA NExT PVD Cluster Tool.
Please click on the "Get Quote" button at the end of the CONCEPT 3 INOVA NExT description, if you'd like to get a quotation, photos and specifications of this PVD Cluster Tool, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This NOVELLUS CONCEPT 3 INOVA NExT PVD Cluster Tool is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


NOVELLUS CONCEPT 3 INOVA NExT Equipment Details

SDI ID: 118275
Manufacturer: NOVELLUS
Model: CONCEPT 3 INOVA NExT
Description: PVD Cluster Tool
Version: 300 mm
Vintage: 01.06.2005
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Deinstalled, Warehoused, Can be inspected by appointment
-See attached photos of current storage conditions
-Fab interface type: Brooks Fixload qty 3
-Hub robot type: Brooks Magnatran 7 p/n 109473-25
-Hub gate valves: VAT
-Cryo pumps type: CTI Cryo Onboard IS-8F
Cryo Compressors Type:: CTI IS1000
-Vacuum Gauges Type: Granville-Philips
-MFC Type: Mykrolis Intelliflow 2 DSMAE100, N2, 35-80 sccm
-Loadlock Turbo Pumps Type: Pfeiffer TMU 1001P
-Deposition Chambers include: Tantalum CH3, Cooling Station, Pre-clean chambers qty 2
-RF Generator: Comet P/N 20045667 Rev 00 Novellus P/N 27-389171-00 2000W 13.56 MHz
-CPI Active Arc Suppression Units
-RF PSUs: AE PDX-5000
-RF Generators: AE RFG-5500
Electricity Supply
Main: 208V 3 Phase 50/60 Hz 272A Full Load Current 
Short Circuit Interrupt 65KA
2nd UPS: 208V 3 Phase 50/60 Hz 160A Full Load Current 
Short Circuit Interrupt 65KA
PVD Control rack equipment includes:
Sorensen DCS80-13E PSUs
Sorensen DLM 60-10 PSUs
TDK-Lambda PSUs
Trek Model 645 PSU

Get Quote



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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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