C&D P9000 Photoresist coater and developer track for Sale

-purchased new in 2020

-never used

-stored at the warehouse - see attached photo of the tool in storage

-Power requirements: 208 VAC, 3 Phase, 60 Hz 40 A

--The System set up for 8" Wafers

Component Description

Cassette qty 2
Develop Module qty 1
Polyimide Coater with Synchro Spin qty 1
Stacked Closed Lid Hot Plate Ovens qty 3 
Stacked Chill Plates qty 2
Centering Station qty 1 
HEPA with Fan Filter Unit qty 1
Central Robot with two end effectors qty 1
5 Gallon Pressure Canisters qty 3 
Syringe Dispense qty 1 
Spare syringe barrels qty 2
SECS/GEM qty 1
Optical EBR qty 1
Optical Character Recognition (OCR) qty 1
Optical centering qty 1
Exhaust Flow Controller qty 1

Additional options:
Chemical Cabinet TBD

Module Description:

Cassette Description:

- Fix station with tilt capability up to two different wafers sizes. (No tilt capability for three different wafer sizes)
- Cassette switch

Centering Station:

- Mechanical centering — standard
- Funnel centering - option

Synchro Spin Coat Module Description:

- Programmable pivoting arm/nozzle dispense with 3 dispense nozzle capability.
- Simultaneous rotation of both top and bottom of the closed coat bowl
- Separate Top EBR arm (TEBR)
- Hi Performance brushless AC Servomotor/Controller; Speed repeatability, < 3 RPM, up to 8000 RPM; Max
acceleration, 50,000 RPM/Sec; Speed increments, 1 RPM; Programmable time, from 1 to 999 sec.
- House drain to be determined

Closed Lid Hot Plate Oven

- Event programmable 0-999.9 seconds

- Programmable fixed proximity bake capability

- Max temp 250°C with Teflon tip pins or max temp 300°C with stainless steel tip pins
Watlow Digital Temperature Controller

- Temp resolution 0.1°C

- Cast-in heater element with hard anodized hot plate oven surface

3-Pin Chill Plate Description:

- 3-Pin vacuum contact
- Hard anodized chill plate surface

Developer Module Description:

- Moving single dispense w/ one (1) spray, one (1) puddle/stream, and top/bottom rinses
- Hi Performance brushless AC Servomotor/Controller,; Speed repeatability, < 3 RPM, up to 8000 RPM; Max
acceleration, 50,000 RPM/Sec; Speed increments, 1 RPM; Programmable time, from 1 to 999 sec.
- Backside rinse and air ring
- Rear drain

Central Atmospheric Robot:

- Dual end effecter
- Greater than 80,000 cycles between failures