Canon FPA-3000i4 i line stepper for Sale

-The equipment was recently de-installed to the warehouse from working condition in the fab. (See attached a photo of the tool current storage condition.).

-The equipment is configured with left hand feed wafer feeder, and a 6 inch reticle changer.

Prior to removal, the equipment was being used for the exposure of non-critical layers.

Wafer Feeder    Left Hand Feed
Wafer Size    8 Inch Notch
Reticle Size    6 inch
Reticle Changer    Standard
Wafer Chuck    8 Inch Pin
Cassette BCR    Yes
Reticle BCR    Yes
PPC    No
RPC    No

Missing Parts: No known missing parts .

General Performance specification for the Canon i4 wafer stepper:-

Reticle Size: 6”, 0.25”t, [5”, 0.09”t option]
Wafer Size:6”, 8” [ 4”, 5” option ]
Magnification:X 1/5
Numerical Aperture:0.60
Image Field: 22 mm [(X)11.14mm x (Y)26mm)
Printing Wavelength:i-line (365 nm)
Resolution:0.35 μm
Illumination Lamp:2.0 kW super-high-pressure
mercury lamp
Illumination Uniformity:≤ 1.2 %
Alignment Modes:TTL Off-Axis He-Ne TV
TTL Off-Axis Broad Band TV
Alignment Light Source:He-Ne laser (633 nm)
Broad Band (Halogen lamp)
Alignment Accuracy:≤ 0.06 μm (mean + 3 σ)
Throughput:≥ 55 wafers / hour (8”, 60 shot)
Wafer Leveling:Die-by-die tilt
Global tilt