TEL Tokyo Electron Unity ME 8555sss 3 CHAMBER OXIDE ETCHER for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron Unity ME 8555sss 3 CHAMBER OXIDE ETCHER.
Please click on the "Get Quote" button at the end of the Unity ME 8555sss description, if you'd like to get a quotation, photos and specifications of this 3 CHAMBER OXIDE ETCHER, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron Unity ME 8555sss 3 CHAMBER OXIDE ETCHER is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

TEL Tokyo Electron Unity ME 8555sss Equipment Details

SDI ID:	118333
Manufacturer:	TEL Tokyo Electron
Model:	Unity ME 8555sss
Description:	3 CHAMBER OXIDE ETCHER
Version:	200 MM
Vintage:	01.07.2001
Quantity:	1
Sales Condition:	as is where is
Lead Time:	immediately
Sales Price:	Inquire
Comments:	The system has been de-installed to the warehouse. It is currently stored in crates. This system can be inspected by appointment at the warehouse. A number of parts have been removed from the system, and are not included. The list of known missing parts is shown below the configuration. Fabsurplus always reccommends that customers should inspect the equipment prior to purchase. Description Specification Title UNITY Me 8555sss System Specification 1 System Overview General Information Technology Oxide Etch Platform Type Me Software Revision Ver 1.00 Wafer Specification Wafer Size 200mm Wafer Shape SMIF Interface NO Chamber Type/Location Process chamber 1 SCCM OXIDE LD TYPE Process chamber 2 SCCM OXIDE LD TYPE Process chamber 3 SCCM OXIDE LD TYPE Cassette chamber Wide Type Slot 25 Slot pitch 1/4 inch Dummy wafer unloading 4 slots Transport chamber UNITY Me System control box ECC controller / TC controller AC power distribution module 1 Rack VAC / RF control module 2 Rack Specific Fab Options Electrical Requirements Installed Option Line Voltage 3-phase 4-wire connection VAC200v / Control system single phaseVAC200v Line Frequency 50/60 Hz System Safety Equipment EMO Switch Type Press To Activate,Turn to Release EMO EMO Guard Ring Yes System Labels English Only Labels PC1 Oxide Etch Metal Etch Chamber Options Chamber Body Aluminum alumite Temperature control range Room temperature ~ 60 ℃ Chamber Orings Armor Crystal / Viton Manometer Type Leybold CR090 33.25Pa Throttle Valve VALVE ASSY THROTTLING GATE 65048-PH52-AFR1(VAT) Upper Chamber Type SCCM UEL Body Baffle plate 8K Top cooling plate 320-T15-215-D100 Upper electrode 320-T55-215-75(CEL) Shield ring T5-280 Gap drive Drive mechanism AC servo motor Upper and lower electrode setting range 15~60mm±0.1mm ESC Type Ceramic ESC (1 body type with groove), Electrostatic wafer clamp Clamping force 6650 Pa, Supply voltage 0 ~ 4kvDC (MAX) Focus Ring Si(Silicone rubber laying) Lift Pin Made by Vespel Temperature control pipe diameter 3/4 inch Back He controller(Center) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa Back He controller(Edge) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa Turbo Pump SEIKO SEIKI STP-A2203W1-U Turbo Pump Controller SEIKO SEIKI SCU-A2203W1-U Bottom Match DAIHEN WMN-30F Top Match DAIHEN AMN-30C10 PC2 Oxide Etch Metal Etch Chamber Options Chamber Body Aluminum alumite Temperature control range Room temperature ~ 60 ℃ Chamber Orings Armor Crystal / Viton Manometer Type Leybold CR090 33.25Pa Throttle Valve VALVE ASSY THROTTLING GATE 65048-PH52-AFR1(VAT) Upper Chamber Type SCCM UEL Body Baffle plate 8K Top cooling plate 320-T15-215-D100 Upper electrode 320-T55-215-75(CEL) Shield ring T5-280 Gap drive Drive mechanism AC servo motor Upper and lower electrode setting range 15~60mm±0.1mm ESC Type Ceramic ESC (1 body type with groove), Electrostatic wafer clamp Clamping force 6650 Pa, Supply voltage 0 ~ 4kvDC (MAX) Focus Ring Si(Silicone rubber laying) Lift Pin Made by Vespel Temperature control pipe diameter 3/4 inch Back He controller(Center) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa Back He controller(Edge) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa Turbo Pump SEIKO SEIKI STP-A2203W1-U Turbo Pump Controller SEIKO SEIKI SCU-A2203W1-U Bottom Match DAIHEN WMN-30F Top Match DAIHEN AMN-30C10 PC3 Oxide Etch Metal Etch Chamber Options Chamber Body Aluminum alumite Temperature control range Room temperature ~ 60 ℃ Chamber Orings Armor Crystal / Viton Manometer Type Leybold CR090 33.25Pa Throttle Valve VALVE ASSY THROTTLING GATE 65048-PH52-AFR1(VAT) Upper Chamber Type SCCM UEL Body Baffle plate 8K Top cooling plate 320-T15-215-D100 Upper electrode 320-T55-215-75(CEL) Shield ring T5-280 Gap drive Drive mechanism AC servo motor Upper and lower electrode setting range 15~60mm±0.1mm ESC Type Ceramic ESC (1 body type with groove), Electrostatic wafer clamp Clamping force 6650 Pa, Supply voltage 0 ~ 4kvDC (MAX) Focus Ring Si(Silicone rubber laying) Lift Pin Made by Vespel Temperature control pipe diameter 3/4 inch Back He controller(Center) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa Back He controller(Edge) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa Turbo Pump SEIKO SEIKI STP-A2203W1-U Turbo Pump Controller SEIKO SEIKI SCU-A2203W1-U Bottom Match DAIHEN WMN-30F Top Match DAIHEN AMN-30C10 Gas Delivery Options Gas Panel Installed Option Cabinet Exhaust 150ｍｍ　-49Ｐａ SLD Fitting Type Accumulation type Valve Diaphragm valve MEGA-MINI(FUJIKIN) Filter TOSHIBA Ceramic CEP-TM-HL-VR-03PB Regulator VERIFLO SQ-MICRO-30-2P-UPG-6028(P-GAS), VERIFLO SQ-MICRO-HF-50-2P-UPG-6010(N2) MFC Horiba Stec SEC-7330MC-UC-800A Pressure switch MKS 51A-13TCA2BA700 Pressure gauge Nagano Keiki GW35-1Q4 Gas Pallet One Installed Option Gas Pallet PC1 Metal Etch GAS1 BLIND - GAS2 Ar 1000 SCCM GAS3 CF4 100 SCCM GAS4 Ar 200 SCCM GAS5 CHF3 100 SCCM GAS6 C2F6 50 SCCM GAS7 C4F6 50 SCCM GAS8 O2 50 SCCM GAS9 O2 500 SCCM GAS10 C4F8 30 SCCM GAS11 He 300 SCCM GAS12 BLIND - Gas Pallet One Installed Option Gas Pallet PC2 Metal Etch GAS1 BLIND - GAS2 Ar 1000 SCCM GAS3 CF4 100 SCCM GAS4 Ar 200 SCCM GAS5 CHF3 100 SCCM GAS6 C2F6 50 SCCM GAS7 C4F6 50 SCCM GAS8 O2 50 SCCM GAS9 O2 500 SCCM GAS10 C4F8 30 SCCM GAS11 He 300 SCCM GAS12 BLIND - Gas Pallet One Installed Option Gas Pallet PC3 Metal Etch GAS1 BLIND - GAS2 Ar 1000 SCCM GAS3 CF4 100 SCCM GAS4 Ar 200 SCCM GAS5 CHF3 100 SCCM GAS6 C2F6 50 SCCM GAS7 C4F6 50 SCCM GAS8 O2 50 SCCM GAS9 O2 500 SCCM GAS10 C4F8 30 SCCM GAS11 He 300 SCCM GAS12 BLIND - Loadlock/Cassette Loadlock Type Wide Body Loadlock Cassette Type Supported Slot 25 Slot pitch 1/4 inch Dummy wafer unloading 4 slots Wafer Out of Cassette Sensor Yes Cassette processing Uni-cassette Peep window Side Pressure switch LEYBOLD PS113 Pre-alignment Unit Wafer centering accuracy ±0.2mm Wafer rotation direction accuracy ±1θ Mainframe Options Transfer Chamber Process Chamber1 Slit Valve V-TEX ROLLCAM GateValve Armor Crystal Process Chamber2 Slit Valve V-TEX ROLLCAM GateValve Armor Crystal Process Chamber3 Slit Valve V-TEX ROLLCAM GateValve Armor Crystal Robot Blade Aluminium Pressure sensor Convectron gauge On The Fly Centerfind No Status Light Tower Yes Signal Lamp Tower Patrite Tower Location Upper right part of the operation surface of the main body Lamp Colors R-G-Y Fab Interface ONLINE TEL standard Unity GEM System Controller Controller GFCI 30ma GFCI Cntrlr Electrical Interface Controller Top Feed AC Cables Controller Exhaust Top Phase II Facilities Cursor Type Blinking Cursor Heat Exchanger/Chiller Low Temp Top Temp INR-497-005(Dual) Brine(CH1:Top) Galden HT-200 +30℃～+90℃ Brine(CH2:Low) Galden HT-135 -20℃～+60℃ CFC R-404A Brine hose SUS304 Maximum length: 20m,Maximum height: 7m Remote Options Generator Rack Options PC1 Bias RF Generator DAIHEN WGA-30A(2MHz) PC1 Top RF Generator DAIHEN AGA-27A3(60MHz) PC2 Bias RF Generator DAIHEN WGA-30A(2MHz) PC2 Top RF Generator DAIHEN AGA-27A3(60MHz) PC3 Bias RF Generator DAIHEN WGA-30A(2MHz) PC3 Top RF Generator DAIHEN AGA-27A3(60MHz) Pump Options Pump Provider EBARA Pump Interface Type EBARA Transport Loadloc Chamber Pump A10S Process Chamber Pump PC1 A10S Process Chamber Pump PC2 A10S Process Chamber Pump PC3 A10S MISSING PARTS LIST Part name Part Number General Description Floppy drive Floppy drive 1D86-023244-14 MO drive communication cable 1D86-023248-15 MO drive power cable 1D80-001496-14 Front monitor 1D80-001496-14 Maintenance controller 1D10-314636-12 Force inlet cover 1810-329468-12 Slit gate valve body 046-001311-1 Signal tower 1D80-004078-11 ECC power supply ECC rack boards ECC rack boards 1D80-004121-12 TOP match 1D80-004982-1 Matcher controller 1810-121864-11 ESC 1D80-005605-12 Process chamber manometer 1D80-004407-11 Back pressure controller (center) 1D80-004407-11 Back pressure controller (Edge) 036-005057-1 ATM Sensor 1D81-000486-11 Pressure controller(PB-6) 1D81-000486-11 Pressure controller(PB-6) 1D10-350848-11 Card rack acrylic cover 017-005557-1 TOP chiller hose 1D10-410483-11 TOP RF cable support (main unit) 020-001089-1 TOP RF cable support screw 1D80-004539-11 Foreline valve for turbo pump exhaust 1810-430592-11 UV cut film for side endpoint windows 040-002527-1 Unit BOX lower part FAN 1D81-000099-J5 MAIO board 1D81-000099-J5 MAIO board 1D80-003894-12 Combination gauge 1D80-004695-11 Filtering for combination gauge 027-003542-1 O-ring for combination gauge 1D80-004122-12 BOT match 1D80-005607-12 Manometer for self-check 1D81-000096-B4 GAS board (1) 012-008460-1 Air operating valve in GAS BOX (G5) 1D80-003246-1* MLT DC BOX200 1D80-003054-13 TOP RF generator 1D80-003143-12 BOT RF generator 1D81-000405-13 ILK board 1D81-00000921B IO board 1D08-000098-13 DIO board 1D08-000096-15 GAS board 1D08-000096-15 GAS board 1D80-004816-14 VAT valve Assy UPS UPS MO drive MO drive 1D80-004876-11 Pre-alignment Hoist unit INR-497(SMC) Chiller
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TEL Tokyo Electron Unity ME 8555sss 3 CHAMBER OXIDE ETCHER for Sale

TEL Tokyo Electron Unity ME 8555sss Equipment Details

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