EVATEC / OERLIKON Clusterline 200 PVD Cluster tool, with 3 process chambers for Sale

-PVD Cluster tool
-Configured for loading 150 mm wafers via open cassettes
-The tool can be used to load up to 200 mm wafers
Through-the-wall
-Ce marked
A Clusterline 200 II CW 
-Including qty 3 PVD Chambers (Pos3/4/5) 
-PM1 = Degas
-PM3 = Ni
-Pm4 = NiSi 11%
-PM5 = AlCu
-TU3 = Aligner
-TU6 = Cooler

-Including qty 1 Degas Chamber (Pos1). 
-PM5 is configured with a hot Chuck and a Pyrometer. 

- The wafer transport system was upgraded in 2025 with a new Brooks control system, which includes a new aligner.

 This upgrade consists of:

    1 x magnetically driven dual arm handling robot, BROOKS
    1 x Brooks Magnatran MAG 7.1 with an extension capability of up to 860mm, equipped with BROOKS control system (non-Berkeley), including CDM
    2 x  of new load lock elevators
    Adapter flange for AWC (Active Wafer Centering)
    Additionally, a cooler on the transport is included.

Installed Software Version: 4.5.1.012

The following parts will be removed from the equipment before consignment, and will not be included in the sale (These parts will be retained for use on other systems):

Brooks Robot Mag 7.1
4 x_CTI Onboard IS Cryopumps 
2 x IS1000 Cryo Compressors
RGAs
Cooler
Degasser
Amplifier

-Please refer to the attached photos showing the tool currently  in the cleanroom.
-Inspection is welcomed by appointment