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Lam Research ® Inova XT PVD System with qty 4 Process modules for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Lam Research ® Inova XT PVD System with qty 4 Process modules.
Please click on the "Get Quote" button at the end of the Inova XT description, if you'd like to get a quotation, photos and specifications of this PVD System with qty 4 Process modules, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Lam Research ® Inova XT PVD System with qty 4 Process modules is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Lam Research ® Inova XT Equipment Details

SDI ID: 118864
Manufacturer: Lam Research ®
Model: Inova XT
Description: PVD System with qty 4 Process modules
Version: 300 mm
Vintage: 01.11.2010
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Deinstalled from working condition in the fab, and removed to a warehouse

Date moved out of fab: 31/07/26

Missing parts: The system computer has had it's hard disk removed, for IP reasons.

Please refer to the attached photos, showing the current condition of this system in the warehouse.

Inpection of this tool is welcomed by appointment.

Main PSU p/n 01-372834-00 Rev 2 (208V, 3 phase)
Chillers: Polycold 2XCL 
Compressors: CTI Cryo IS1000
Mechanical Pumps: 
Leybold Varodry VD100 60 Hz 
Leybold Leyvac Lv80C 

Process Chambers

PM6 = Inova XT PRECLN A
PM2 = Inova XT PRECLN B
PM1 = Inova XT HCM  Cu B chamber
PM5 = Inova XT HCM TaN A chamber
PM7 = Inova XT HCM  Cu A chamber
PM3 = Inova XT HCM TaN B chamber

Inova Next Cooldown Station qty 5 ??


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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