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ASML XT1900GI Immersion Scanner for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ASML XT1900GI Immersion Scanner.
Please click on the "Send More Details" button at the end of the XT1900GI description, if you'd like to get more details, photos and specifications of this Immersion Scanner, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASML XT1900GI Immersion Scanner is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


ASML XT1900GI Equipment Details

SDI ID: 101016
Manufacturer: ASML
Model: XT1900GI
Description: Immersion Scanner
Version: 300 mm
Vintage: 01.07.2008
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Specifications

Configuration

Maker

ASML

Model

XT1900Gi

Vintage

07/2008

Wafer Size

300 mm

Main Process

Photo

Sub Process

IMM

Material/Chemical

Align

Operating System

UNIX

SMIF/FOUP

Yes

Hardware Composition

Classification

Composition

Maker

Model

Process Module

Main

ASML

XT199Gi

Workstation

ASML

Netra240

Process Module Specification

Classification

Composition

Model/Type

Qty

 

 

Process Module

PM1

Light Source

1

PM2

Alignment

1

PM3

Stage

1

PM4

-

-

PM5

-

-

PM6

-

-

Litho Tool Specification

Classification

Composition

Type

Model

Qty

For Photo Tool

Lens

ASML

8

1

Laser

Gigaphoton

GT61A4

 

Missing Parts List

Missing Parts

Description

1

SS1 XY MOTOR

2

SS1 E-PIN MODULE

3

SS1 ADC FLEX CABLE

4

WS SS1 MANIFOLD BLOCK

5

MEASURE SIDE  CCM COVER

6

Li b 1

7

OIU MONITOR

FSR  NCB Board (slot 11)

9

REMA 24V PSU

10 

MCR 24V PSU

11

WSRC DCDC BOARD

12

REMA 24V PSU BOARD

13

RS FAN

14 

PC

15

WSRC PADC BOARD

16

RH GRIPPER

17

RS Z2 Diffsensor

18

WH RACK 15V PSU BOARD

19

ADC BOARD(CHUC2)

20

WS PAAC 550/25 BOARD

21 

MCR PIPA BOARD (Slot26)

22

EZCAP BOARD

23

RSRC LS Y22 PAAC BOARD

24

MPCR MCCB 03 BOARD

25

RED LASER

26

WH Unload Robot

27

WH UNLOAD CFC

28 

RL 1 S2TO SENSOR CABLE

29

CLD VALVE

30

WSRC SS2 2XY1 PADC BOARD

31

HERB Y BOARD

32

TURRET CCM0 GRIPPER

33

OFF-AXIS GREEN LASER SUPPLY

34

RSRC DCDC BOARD

35

WSM  CAS1 PAAC

36

HSSL CABLE (SIOB  MHB)

37

LR GRIPPER

38

UR WRIST ASSY

39

MSAC, Legato BOARD

40

RSRC HEAT EXCHANBER

41 

MCR DCCB BOARD

42

H-DRIVE  BRACKET

43

SHB ECAB BOX

44

WS_SS_2XY3  PADC

45

RS_SS_Y12 PADC

46

CENTERING  CFC

47

WS_SS2_XY1  PADC

48

WS 24V PSDC

49

MCCB2 BOARD

50

WS SIOB BOARD

51

WISC 24V POWER SUPPLY

52 

FSR 24V POWER SUPPLY

53

WORKSTATION

54

REMA X Ch23 PAAC BOARD

55

WSRC HEAT EXCHANGER

56

CH2  ADC BOARD

57

CH2  ADC CABLE(TIS, ILIAS)

58

W/S   PS1

59

W/S   Air Duct / F0,  F1

60

MPCR MCCB Board 6

61

CTMR SLOT3 RP

62

ESBA

63

RH MPD RELAY BOX

64 

FSR rack

Lens Data

Latest Lens Data (2018-07-26)

 

 

Projection Lens

1.1 RMS Z5-Z37 [nm]

1.27

1.2 RMS spherical [nm]

0.84

1.3 RMS coma [nm]

0.4

1.4 RMS astigmatism [nm]

0.38

1.5 RMS 3-foil [nm]

0.49

1.6 Straylight at ref. blocksize [%]

-

 

Illumination

2.1 Integrated slit uniformity, Setting 1 [%]

0.17

2.2 Illumination intensity, Setting 1[mW/cm2]

2019

2.3 Dose repeatability [%]

-

2.4 Dose accuracy, setting 1 [%]

-

Pupil Verification

3.1 Ellipticity, Setting 1 (mean)

0.616

Focus and Levelling

4.1 Levelling  verification

NA

Chuck to chuck focus difference (nm)

NA

 

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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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