SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Centris AdvantEdge G5 Mesa Poly Dry Etch 6 chamber Mesa II + 2 AxisWll.
Please click on the "Send More Details" button at the end of the Centris AdvantEdge G5 Mesa Poly description, if you'd like to get more details, photos and specifications of this Dry Etch 6 chamber Mesa II + 2 AxisWll, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Centris AdvantEdge G5 Mesa Poly Dry Etch 6 chamber Mesa II + 2 AxisWll is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Model:||Centris AdvantEdge G5 Mesa Poly|
|Description:||Dry Etch 6 chamber Mesa II + 2 AxisWll|
|Sales Condition:||as is where is|
Current Condition: Used, In Warehouse - Crated - - Chamber details: Chm Position 1: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR Chm Position 2: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR Chm Position 3: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR Chm Position 4: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR Chm Position 5: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR Chm Position 6: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR Chm Position 7: AxiSwll; Chemicals / Gases Used: H2, O2, N2 Chm Position 8: AxiSwll; Chemicals / Gases Used: H2, O2, N2 - Remote Components Cathode chiller:SMC-496 Qty 6/208 AC 3-Phase (Not include on tool sales) Wall chiller:SMC-H2010 Qty 3/208 AC 3-Phase(Not included) - STANDARD SPECIFICATIONS Software Revision : B27243 FI Software: rel-2.11.0 GEM SEC Revision: 18.104.22.168 Wafer Size: Diameter 300+/-0.05mm(SEMI M28). 775+/-25um, Notch Carrier: FOUP (Comply with SEMI E47.1 (25wafers)) Load Port: 4 Loadports Facility plate: N2 Regulator; Supplied by Fab in floor, CDA regulator 125 PSI on board SMC pressure switch Loadlock Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog Transfer Pressure monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog Transfer Pressure monitor: DCR PRESS ABS 1TORR 1/2FVCR 0-10V-OUT 9P-D .5%ACC Signal Tower: Red/Yellow/Green/Blue(Front x1 and center section of loadside and maintenance side x1)DNET Light tower, 4 light cover (RAGV) w/CLR DAUG EMO: Turn to Release (FI x3, Ch x6, AC x1) 3 on FI, 1 on each chamber, 1 on AC Box Cable Length: HX Control Cable Length 100FT/ Heat Exchanger Hose Length 100FT/ Pump Cable Length 75FT/ Monitor 1 Cables 25 FEET WITH 16 FEET EFFECTIVE Monitor: DUAL 17 IN FLAT PANEL WITH KEYBOARD ON ERGO ARM/ REMOTE 17 IN FLAT PANEL ON STAND IPUP: BOC Edward iXL180 X2(1 for LL/1 for MF) - HARDWARE CONFIGURATION (Process chamber) Chamber type: CENTRIS+ ADVANTEDGE G5M Process kits: Y2O3/Al2O3/SiO2 Gas inject: Y2O3 Solid Nozzle chamber O-ring: KALREZ Turbo pump: BOC Edwards/ STP-XA3203CV RF match: RF Match[RF MATCH, 13.56 MHZ, 8 KVP, 85 A, NAVIGATOR 3013, DPS 232] / RF Match[RF MATCH, 13.56 MHZ, 3 KV, 35 A, NAVIGATOR 1013-B20N, DPS 232] RF generator: GEN RF 13.56MHZ 3KW APEX 3013 3 PHASE 208V / GEN RF 13.56MHZ 1.5KW APEX 1513 3 PHASE 208V EPD windows: Quartz CM Test port: 1/2 VCR Dual RGA Port: none Endpoint Type: Endpoint type (Eye-D) Endpoint Wavelength 1: 200–800nm Cathode Temperature Monitor: Yes ESC Power Supply: POWER SUPPLY DC +2KV/-5KV 25W, 24VDC. ESC WITH LOOP COMPENSATION RF Feed: By inductively coupled plasma source, the ion energy and ion density Liner: Y2O3 LINER - PROCESS GAS BOX CONFIGURATION (Process chamber) Gas line 1: Gas line 1-O2 15 sccm GF-125 Gas line 2: Gas line 2-SF6 30 sccm GF-125 Gas line 3: Gas line 3-Heated C4F6 50 sccm GF-125 Gas line 4: Gas line 4-CF4 50 sccm GF-125 Gas line 5: Gas line 5-Cl2 100 sccm GF-125 Gas line 6: Gas line 6-HBr 100 sccm GF-125 Gas line 7: Gas line 7-SO2 100 sccm GF-125 Gas line 8: Gas line 8-CH2F2 100 sccm GF-125 Gas line 9: Gas line 9-SF6 200 sccm GF-125 Gas line 10: Gas line 10-Heated BCl3 200 sccm GF-125 Gas line 11: Gas line 11-HBr 600 sccm GF-125 Gas line 12: Gas line 12-CL2 600 sccm GF-125 Gas line 13: Gas line 13-O2 150 sccm GF-125 Gas line 14: Gas line 14-N2 200 sccm GF-125 Gas line 15: Gas line 15-CF4 300 sccm GF-125 Gas line 16: Gas line 16-CHF3 400 sccm GF-125 Gas line 17: Gas line 17-Ar 500 sccm GF-125 Gas line 18: Gas line 18-He 1000 sccm GF-125 - PROCESS GAS BOX CONFIGURATION (Strip chamber) Gas line 7: Gas line 7-N2 1000 sccm GF-125 Gas line 8: Gas line 8-O2 10000 sccm GF-125 Gas line 10: Gas line 10-H2/N2 5000 sccm GF-125 - Damage/Missing parts list
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