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Applied Materials Endura II Copper Barrier/Seed PVD CH 1 & 3 SIP Ti CH C,D Reactive PC, CH 2 EnCoReII Ta ,CH 4 EnCoReII Cu for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Endura II Copper Barrier/Seed PVD CH 1 & 3 SIP Ti CH C,D Reactive PC, CH 2 EnCoReII Ta ,CH 4 EnCoReII Cu.
Please click on the "Send More Details" button at the end of the Endura II Copper Barrier/Seed description, if you'd like to get more details, photos and specifications of this PVD CH 1 & 3 SIP Ti CH C,D Reactive PC, CH 2 EnCoReII Ta ,CH 4 EnCoReII Cu, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Endura II Copper Barrier/Seed PVD CH 1 & 3 SIP Ti CH C,D Reactive PC, CH 2 EnCoReII Ta ,CH 4 EnCoReII Cu is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials Endura II Copper Barrier/Seed Equipment Details

SDI ID: 103059
Manufacturer: Applied Materials
Model: Endura II Copper Barrier/Seed
Description: PVD CH 1 & 3 SIP Ti CH C,D Reactive PC, CH 2 EnCoReII Ta ,CH 4 EnCoReII Cu
Version: 300mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:
Current Condition: Installed - In Production - - Chamber Position 1 & 3 - Process Type SIP Ti Chamber Position c & D - Process Type Reactive PC Chamber Position 2 - EnCoReII Ta Chamber Position 4 - EnCoReII Cu - Process Type: SIP Ti Chamber position: 1,3 Shutter option: yes chamber body (Al or SST): SST chamber body part number: 0242-33289 Slit valve seal (bonded or o-ring): Bonded Slit Valve door part number: 0040-84391 Target vendor: Nikko/Tosoh Target No.: TAG73 Bakeout/idle power (%): 40 E-Mag Power Supply: n/a E-Mag Supply Vendor/Type: n/a OEM Part Number: n/a DC Power supply(AE-MDX????): AE-Pinnacle AMAT Part number Master: 0190-34650 OEM Part Number Master: n/a AMAT Part number Slave: 0190-34650 OEM Part Number Slave: n/a Generator Size : 20kw Total DC (12 kwh,24kwh, etc): 40kw Bias Generator : ENI - GHW12Z AMAT Part number : 0190-25529 OEM Part Number: GHW-12Z-12DF2NH-001 Bias Generator Size: 1250w Bias Generator Frequency: 13.56 Mhz Rf coil generator: n/a AMAT Part number : n/a OEM Part Number: n/a RF1 power cable P/N (bias): 0190-02031 RF2 power cable P/N (resonator): n/a RF cable (match bax to PIB): 0190-15905 Magnet rotation speed (rpm): 65 Magnet shim thickness: n/a Magnet type: SIP Magnet part number: 0010-11228 Magnet Serial Number (man. Date): no need Target to magnet spacing(mm): 1.5mm adaptor p/n: 0040-82921 Kit spacer upper p/n: 0040-76943 Kit spacer lower p/n: 0040-62877 upper shield p/n: 0020-23549 Treatment (Arc spray/Bead Blast): Arc Spray Treatment roughness (RA): na lower shield p/n: 0020-02344 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): na inner(or mid) shield p/n: 0020-54777 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): na shield clamp p/n: na Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na inner(or mid) shield clamp p/n: 0020-08299 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): na lower shield clamp p/n: 0020-02348 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): na pedestal cover p/n: na Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na dep ring p/n: 0200-08301 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na cover ring p/n: 0021-17770 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): na insulator bushing p/n: 0200-00590 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na Shutter: 0021-25014 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): na pedestal type: FDR SLT pedestal p/n: 0010-22985 heater spacing in mm: no concern heater spacing in steps: -55050 min heater spacing in mm: no concern min heater spacing in steps: no concern max heater spacing in mm: no concern max heater spacing in steps: no concern Lift fingers p/n: no concern Lift hoop p/n: no concern Cryo restrictor(Y/N): na Cryo restrictor Part Number: na Max Cryo regen gas load (L): 400 Cryo gate valve (2/3 pos): 3 Position MFC 1 Gas: N2 MFC 1 Cal Factor: . MFC 1 Size: 100 MFC 1 Type: na MFC 1 Part Number: na MFC 2 Gas: na MFC 2 Cal Factor: na MFC 2 Size: na MFC 2 Type: na MFC 2 Part Number: na MFC 3 Gas: Ar MFC 3 Cal Factor: na MFC 3 Size: 50 MFC 3 Type: na MFC 3 Part Number: na MFC 4 Gas: ArH MFC 4 Cal Factor: na MFC 4 Size: 20 MFC 4 Type: na MFC 4 Part Number: na Chamber base pressure (T): 2.0 e-8 Chamber Rate-of-Rise(nTorr/min): 522 Press. and ROR at Startup: no concern Pressure Rise 1 min: no concern Pressure Rise 5 min: no concern Pressure Rise 10 min: no concern Pressure vs. Gas Flow table: no concern Process Ar Supply Pressure: 30 Process N2 Supply Pressure: 30 Cryo Regen N2 pressure: 90 Vent Ar pressure: 40 Optional Gas (He): na O2 (Ch. F): na H2(Ch. E): na H2(Ch. C): na CDA: 88 SLIT VALVE CDA: 82 Cooling Water Flow (GPM): 8.9 - Process Type: Reactive PC Chamber position: C/D Shutter option: none chamber body (Al or SST): Al chamber body part number: 0040-76718 Slit valve seal (bonded or o-ring): Bonded Slit Valve door part number: 0040-84391 Target vendor: n/a Target No.: n/a Bakeout/idle power (%): n/a E-Mag Power Supply: n/a E-Mag Supply Vendor/Type: n/a OEM Part Number: n/a DC Power supply(AE-MDX????): n/a AMAT Part number Master: n/a OEM Part Number Master: n/a AMAT Part number Slave: n/a OEM Part Number Slave: n/a Generator Size : n/a Total DC (12 kwh,24kwh, etc): n/a Bias Generator : n/a AMAT Part number : n/a OEM Part Number: n/a Bias Generator Size: n/a Bias Generator Frequency: 13.56MHz / 2MHz (in one generator) Rf coil generator: COMDEL CDX-2000 AMAT Part number : 0190-23308 OEM Part Number: n/a RF1 power cable P/N (bias): 0190-01458 RF2 power cable P/N (resonator): 0190-04657 RF cable (match bax to PIB): 0150-22371 (Cobalt/reflow) Magnet rotation speed (rpm): n/a Magnet shim thickness: n/a Magnet type: n/a Magnet part number: n/a Magnet Serial Number (man. Date): no need Target to magnet spacing(mm): n/a adaptor p/n: n/a Kit spacer upper p/n: n/a Kit spacer lower p/n: n/a upper shield p/n: Belljar 0040-55456 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a lower shield p/n: 0040-86514 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a inner(or mid) shield p/n: 0021-19342 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a shield clamp p/n: Pedestal�0020-19258 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a inner(or mid) shield clamp p/n: Insulator�0020-01903 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a lower shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a pedestal cover p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a dep ring p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a cover ring p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a insulator bushing p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a Shutter: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a pedestal type: n/a pedestal p/n: n/a heater spacing in mm: n/a heater spacing in steps: n/a min heater spacing in mm: n/a min heater spacing in steps: n/a max heater spacing in mm: n/a max heater spacing in steps: n/a Lift fingers p/n: n/a Lift hoop p/n: n/a Cryo restrictor(Y/N): n/a Cryo restrictor Part Number: n/a Max Cryo regen gas load (L): n/a Cryo gate valve (2/3 pos): Pendulum MFC 1 Gas: He MFC 1 Cal Factor: 1 MFC 1 Size: 300 MFC 1 Type: He MFC 1 Part Number: 0010-42845 MFC 2 Gas: Ar2 MFC 2 Cal Factor: 1 MFC 2 Size: 200 MFC 2 Type: Ar MFC 2 Part Number: 0010-42857 MFC 3 Gas: Ar MFC 3 Cal Factor: 1 MFC 3 Size: 20 MFC 3 Type: Ar MFC 3 Part Number: 0010-42843 MFC 4 Gas: (MFC6) H2 MFC 4 Cal Factor: (MFC6) 1 MFC 4 Size: (MFC6) 100 MFC 4 Type: (MFC6) H2 MFC 4 Part Number: (MFC6) 0010-42861 Chamber base pressure (T): 0.0000002 Chamber Rate-of-Rise(nTorr/min): 15000 Press. and ROR at Startup: not necessary Pressure Rise 1 min: not necessary Pressure Rise 5 min: not necessary Pressure Rise 10 min: not necessary Pressure vs. Gas Flow table: not necessary Process Ar Supply Pressure: 34.7 Process N2 Supply Pressure: 33.9 Cryo Regen N2 pressure: 100 Vent Ar pressure: 47.7 Optional Gas (He): 30.1 O2 (Ch. F): n/a H2(Ch. E): n/a H2(Ch. C): n/a CDA: 95.7 SLIT VALVE CDA: 85 Cooling Water Flow (GPM): 0.8 - Process Type: EnCoReII Ta Chamber position: 2 Shutter option: yes chamber body (Al or SST): SST "chamber body part number: 0040-81737 0040-99334 0040-77918 0040-98657" Slit valve seal (bonded or o-ring): Bonded Slit Valve door part number: 0040-84391 Target vendor: Nikko Target No.: TAG124 Bakeout/idle power (%): 0 E-Mag Power Supply: 0195-03305 E-Mag Supply Vendor/Type: Kollmorgen OEM Part Number: n/a DC Power supply(AE-MDX????): AE-Pinnacle AMAT Part number Master: 0190-24674 OEM Part Number Master: na AMAT Part number Slave: 0190-24674 OEM Part Number Slave: n/a Generator Size : 20kw Total DC (12 kwh,24kwh, etc): 40kw Bias Generator : ENI - GHW12Z AMAT Part number : 0190-25530 OEM Part Number: GHW-12Z-12DF2NH-001 Bias Generator Size: 1250w Bias Generator Frequency: 13.56 Mhz Rf coil generator: n/a AMAT Part number : n/a OEM Part Number: n/a RF1 power cable P/N (bias): RF2 power cable P/N (resonator): n/a RF cable (match bax to PIB): Magnet rotation speed (rpm): 65 Magnet shim thickness: n/a Magnet type: Magnet part number: Magnet Serial Number (man. Date): no need Target to magnet spacing(mm): 1.5mm adaptor p/n: see chamber body Kit spacer upper p/n: see chamber body Kit spacer lower p/n: see chamber body upper shield p/n: 0020-23549 Treatment (Arc spray/Bead Blast): Arc Spray Treatment roughness (RA): na lower shield p/n: 0020-44976 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na inner(or mid) shield p/n: 0020-99268 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na shield clamp p/n: na Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na inner(or mid) shield clamp p/n: na Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na lower shield clamp p/n: na Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na pedestal cover p/n: na Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na dep ring p/n: 0020-63125 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na cover ring p/n: 0020-63124 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na insulator bushing p/n: 0200-00590 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na Shutter: 0020-45231 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na pedestal type: Falcon ESC pedestal p/n: 0010-24456 heater spacing in mm: no concern heater spacing in steps: -55050 min heater spacing in mm: no concern min heater spacing in steps: no concern max heater spacing in mm: no concern max heater spacing in steps: no concern Lift fingers p/n: no concern Lift hoop p/n: no concern Cryo restrictor(Y/N): na Cryo restrictor Part Number: na Max Cryo regen gas load (L): 400 Cryo gate valve (2/3 pos): 3 Position MFC 1 Gas: N2 MFC 1 Cal Factor: . MFC 1 Size: 92 MFC 1 Type: na MFC 1 Part Number: na MFC 2 Gas: na MFC 2 Cal Factor: na MFC 2 Size: na MFC 2 Type: na MFC 2 Part Number: CELERITY MFC 3 Gas: Ar MFC 3 Cal Factor: na MFC 3 Size: 50 MFC 3 Type: na MFC 3 Part Number: CELERITY MFC 4 Gas: ArH MFC 4 Cal Factor: na MFC 4 Size: 20 MFC 4 Type: na MFC 4 Part Number: CELERITY Chamber base pressure (T): 2.0 e-8 Chamber Rate-of-Rise(nTorr/min): 522 Press. and ROR at Startup: no concern Pressure Rise 1 min: no concern Pressure Rise 5 min: no concern Pressure Rise 10 min: no concern Pressure vs. Gas Flow table: no concern Process Ar Supply Pressure: 30 Process N2 Supply Pressure: 30 Cryo Regen N2 pressure: 90 Vent Ar pressure: 40 Optional Gas (He): na O2 (Ch. F): na H2(Ch. E): na H2(Ch. C): na CDA: 88 SLIT VALVE CDA: 82 Cooling Water Flow (GPM): 8.9 - Process Type: EnCoReII Cu Chamber position: 4 Shutter option: yes chamber body (Al or SST): SST "chamber body part number: 0040-64076 0040-90375 0090-04724 0040-76824" Slit valve seal (bonded or o-ring): Bonded Slit Valve door part number: 0040-84391 Target vendor: Nikko Target No.: TAG131 Bakeout/idle power (%): 0 E-Mag Power Supply: n/a E-Mag Supply Vendor/Type: n/a OEM Part Number: n/a DC Power supply(AE-MDX????): AE-Pinnacle AMAT Part number Master: 0190-25692 OEM Part Number Master: n/a AMAT Part number Slave: 0190-25692 OEM Part Number Slave: n/a Generator Size : 20kw Total DC (12 kwh,24kwh, etc): 40kw Bias Generator : ENI - GHW12Z AMAT Part number : 0190-25530 OEM Part Number: GHW-12Z-12DF2NH-001 Bias Generator Size: 1250w Bias Generator Frequency: 13.56 Mhz Rf coil generator: n/a AMAT Part number : n/a OEM Part Number: n/a RF1 power cable P/N (bias): RF2 power cable P/N (resonator): n/a RF cable (match bax to PIB): Magnet rotation speed (rpm): 65 Magnet shim thickness: n/a Magnet type: Magnet part number: Magnet Serial Number (man. Date): no need Target to magnet spacing(mm): 1.5mm adaptor p/n: see chamber body Kit spacer upper p/n: see chamber body Kit spacer lower p/n: see chamber body upper shield p/n: 0021-16781 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na lower shield p/n: 0020-85755 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na inner(or mid) shield p/n: 0020-83706 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na shield clamp p/n: na Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na inner(or mid) shield clamp p/n: 0020-26374 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na lower shield clamp p/n: 0020-02348 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na pedestal cover p/n: na Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na dep ring p/n: 0200-04017 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na cover ring p/n: 0021-16783 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na insulator bushing p/n: 0200-00590 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na Shutter: 0021-25014 Treatment (Arc spray/Bead Blast): na Treatment roughness (RA): na pedestal type: Falcon ESC pedestal p/n: 0010-24456 heater spacing in mm: no concern heater spacing in steps: -55050 min heater spacing in mm: no concern min heater spacing in steps: no concern max heater spacing in mm: no concern max heater spacing in steps: no concern Lift fingers p/n: no concern Lift hoop p/n: no concern Cryo restrictor(Y/N): na Cryo restrictor Part Number: na Max Cryo regen gas load (L): 400 Cryo gate valve (2/3 pos): 3 Position MFC 1 Gas: na MFC 1 Cal Factor: na MFC 1 Size: na MFC 1 Type: na MFC 1 Part Number: na MFC 2 Gas: Ar MFC 2 Cal Factor: 1 MFC 2 Size: 200 MFC 2 Type: na MFC 2 Part Number: CELERITY MFC 3 Gas: Ar MFC 3 Cal Factor: na MFC 3 Size: 20 MFC 3 Type: na MFC 3 Part Number: CELERITY MFC 4 Gas: ArH MFC 4 Cal Factor: na MFC 4 Size: 20 MFC 4 Type: na MFC 4 Part Number: CELERITY Chamber base pressure (T): 2.0 e-8 Chamber Rate-of-Rise(nTorr/min): 522 Press. and ROR at Startup: no concern Pressure Rise 1 min: no concern Pressure Rise 5 min: no concern Pressure Rise 10 min: no concern Pressure vs. Gas Flow table: no concern Process Ar Supply Pressure: 30 Process N2 Supply Pressure: 30 Cryo Regen N2 pressure: 90 Vent Ar pressure: 40 Optional Gas (He): na O2 (Ch. F): na H2(Ch. E): na H2(Ch. C): na CDA: 88 SLIT VALVE CDA: 82 Cooling Water Flow (GPM): 8.9 - Damage/Missing parts list
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