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Applied Materials Centura Ultima HDP CVD 3 CHAMBER HDP CVD SYSTEM for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Centura Ultima HDP CVD 3 CHAMBER HDP CVD SYSTEM. This Applied Materials Centura Ultima HDP CVD 3 CHAMBER HDP CVD SYSTEM is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this 3 CHAMBER HDP CVD SYSTEM and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


Applied Materials Centura Ultima HDP CVD Equipment Details

SDI ID: 95546
Manufacturer: Applied Materials
Model: Centura Ultima HDP CVD
Description: 3 CHAMBER HDP CVD SYSTEM
Version: 200 mm
Vintage: 01.06.2001
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): Inquire
Comments:

Configuration:-

1. HARDWARE REQUIREMENT _ AMAT ULTIMA PLUS  
   
Mainframe Overview Specification:
Mainframe Type Centura 5200 Regulated
FAB Installation Through-the-Wall
Chamber A HDP
Chamber B HDP
Chamber C HDP
Chamber D  
Chamber E Multi-Slot Cool (refurbished)
Chamber F Orienter (refurbished)
Mainframe Options
Loadlocks Widebody loadlocks
Loadlock Vent Type FAST VENT
Loadlock Platform UNIVERSAL
Cassette Type  
SMIF Robot NA
Wafer Sensors Yes
Cassette Present Yes
Integrated Cassette Sensor Yes
Fast Wafer Mapping Yes
SECSI/SECSII Yes
N2 Purge MFC STEC 4400 500 sccm (refurbished)
Robot HP EXTENDED AMAT, refurbished using ceramic bearing kit.
Robot Blade Ceramic
Buffer Chamber Cleaned/refurbished
OTF Centering Yes
Wafer on Blade Standard Sensors
Buffer Lid Hoist Yes
Slit Doors Bonded
Signal Light Tower Yes, 3 color
Monitors Flat Panel QTY: 2
CE Mark No
System EMO Type Turn to reset
Sys Controller Type PHASE II
Controller Electrical Top Feed AC cables
Controller Exhaust Top Exhaust
Controller Interface Seriplex
Controller GFCI 100 mA
Hard Drive Solid State Drive
Pumps Customer provides
Electrical 208VAC 60 Hz
Chamber Type/Location
Chamber A Ultima Plus HDPCVD
Chamber B Ultima Plus HDPCVD
Chamber C Ultima Plus HDPCVD
Chamber D  

 

 

CHAMBER DETAIL Chamber A Chamber B Chamber C
Application HDP HDP HDP
Chamber Type HDP-RPS HDP-RPS HDP-RPS
Process Type USG USG USG
Gas Ring 24 nozzle (new) 24 nozzle (new) 24 nozzle (new)
Center Nozzle AL203 4-hole (new) AL203 4-hole (new) AL203 4-hole (new)
Side Nozzles Ceramic AL203 Long/Long (new) Ceramic AL203 Long/Long (new) Ceramic AL203 Long/Long (new)
Heated Pedestal ESC (refurbished) ESC (refurbished) ESC (refurbished)
Cathode Type Refurbished ESC W/ WTM (Sekidenko 2000) Refurbished ESC W/ WTM (Sekidenko 2000) Refurbished ESC W/ WTM (Sekidenko 2000)
Manometer Type Dual Dual Dual
Manometer 1 MKS 100 mTorr (refurbished) MKS 100 mTorr (refurbished) MKS 100 mTorr (refurbished)
Manometer 2 MKS 10 Torr (refurbished) MKS 10 Torr (refurbished) MKS 10 Torr (refurbished)
Foreline Manometer MKS 10 Torr (refurbished) MKS 10 Torr (refurbished) MKS 10 Torr (refurbished)
Dual IHC YES (10/20 Torr) (refurbished) YES (10/20 Torr) (refurbished) YES (10/20 Torr) (refurbished)
Oring Selection Superchem (New) Superchem (New) Superchem (New)
Lid Type RPS RPS RPS
Throttle Valve Direct drive (refurbished) Direct drive (refurbished) Direct drive (refurbished)
Turbo Gate NC or VTEX (refurbished) NC or VTEX (refurbished) NC or VTEX (refurbished)
HF Generator ENI Ultima + (New) ENI Ultima + (New) ENI Ultima + (New)
Bias RF Match Style AE (refurbished) AE (refurbished) AE (refurbished)
Local matches Top/Side (refurbished) Top/Side (refurbished) Top/Side (refurbished)
Turbo Pump ET-1600WS refurbished ET-1600WS refurbished ET-1600WS refurbished
Clean Generator Refurbished MKS Refurbished MKS Refurbished MKS
ASTRON AX7670 ASTRON AX7670 ASTRON AX7670
BALANCED SIDE COIL OPTION YES YES YES
Endpoint Type      
Process Kit  
Umbilical Cables  
Heat Exchanger SMC Dual loop, INR498-001 (refurbished)
       
       
GAS PANEL CONFIGURATION
  CH A (USG) CH B (USG) CH C (USG)
GAS 1 O2-SIDE 400 sccm O2-SIDE 400 sccm O2-SIDE 400 sccm
GAS 2 Ar-SIDE 300 sccm Ar-SIDE 300 sccm Ar-SIDE 300 sccm
GAS 3 SiH4-SIDE 200 sccm SiH4-SIDE 200 sccm SiH4-SIDE 200 sccm
GAS 4 NA NA NA
GAS 5 Ar-TOP 50 sccm Ar-TOP 50 sccm Ar-TOP 50 sccm
GAS 6 SiH4-TOP 20 sccm SiH4-TOP 20 sccm SiH4-TOP 20 sccm
GAS 7 NA NA NA
GAS 8 NF3-MW 2000 sccm NF3-MW 2000 sccm NF3-MW 2000 sccm
GAS 9 Ar-MW 2000 sccm Ar-MW 2000 sccm Ar-MW 2000 sccm
GAS 10 No-top O2/RPS No-top O2/RPS No-top O2/RPS
Side Pallets Split Pump/Purge Option Yes Yes Yes
Gas panel doors Solid, no windows Solid, no windows Solid, no windows
Gas line filters Yes, new Yes, new Yes, new
Injector valve N/A N/A N/A
Single Line Drop Yes Yes Yes
Gas channel regulators and pressure transducers Refurbished Refurbished Refurbished
Gas Panel Exhaust Top, CHA/C SIDE Top, CHA/C SIDE Top, CHA/C SIDE
GAS Valve Type and GAS PANEL FUJIKING VALVES. ALL GAS STICKS REQUIRE REGULATORS AND PRESSURE TRASDUCERS FUJIKING VALVES. ALL GAS STICKS REQUIRE REGULATORS AND PRESSURE TRASDUCERS FUJIKING VALVES. ALL GAS STICKS REQUIRE REGULATORS AND PRESSURE TRASDUCERS

 

 

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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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